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The effect of cupric ion concentration on the nucleation and growth of copper on RuTa seeded substrates

(2013) ELECTROCHIMICA ACTA. 92. p.474-483
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Direct plating, Copper plating, Copper concentration, Copper deposition, Nucleation and growth, Coalescence thickness, ELECTROCHEMICAL NUCLEATION, CU INTERCONNECTS, BARRIER LAYERS, ELECTRODEPOSITION, KINETICS, DEPOSITION, SULFATE, CARBON

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Citation

Please use this url to cite or link to this publication:

Chicago
Nagar, Magi Margalit, Alec Radisic, Katrien Strubbe, and Philippe M Vereecken. 2013. “The Effect of Cupric Ion Concentration on the Nucleation and Growth of Copper on RuTa Seeded Substrates.” Electrochimica Acta 92: 474–483.
APA
Nagar, M. M., Radisic, A., Strubbe, K., & Vereecken, P. M. (2013). The effect of cupric ion concentration on the nucleation and growth of copper on RuTa seeded substrates. ELECTROCHIMICA ACTA, 92, 474–483.
Vancouver
1.
Nagar MM, Radisic A, Strubbe K, Vereecken PM. The effect of cupric ion concentration on the nucleation and growth of copper on RuTa seeded substrates. ELECTROCHIMICA ACTA. 2013;92:474–83.
MLA
Nagar, Magi Margalit, Alec Radisic, Katrien Strubbe, et al. “The Effect of Cupric Ion Concentration on the Nucleation and Growth of Copper on RuTa Seeded Substrates.” ELECTROCHIMICA ACTA 92 (2013): 474–483. Print.
@article{3231742,
  author       = {Nagar, Magi Margalit and Radisic, Alec and Strubbe, Katrien and Vereecken, Philippe M},
  issn         = {0013-4686},
  journal      = {ELECTROCHIMICA ACTA},
  keywords     = {Direct plating,Copper plating,Copper concentration,Copper deposition,Nucleation and growth,Coalescence thickness,ELECTROCHEMICAL NUCLEATION,CU INTERCONNECTS,BARRIER LAYERS,ELECTRODEPOSITION,KINETICS,DEPOSITION,SULFATE,CARBON},
  language     = {eng},
  pages        = {474--483},
  title        = {The effect of cupric ion concentration on the nucleation and growth of copper on RuTa seeded substrates},
  url          = {http://dx.doi.org/10.1016/j.electacta.2013.01.037},
  volume       = {92},
  year         = {2013},
}

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