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Multi-sensors modules in SiGeMEMS technology

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Keywords
SiGe, accelerometer, MEMS, CMOS, gyroscope

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Citation

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Chicago
Tilmans, HAC, A Witvrouw, S Severi, P Helin, MA Erismis, L Haspeslagh, Maaike Op de Beeck, et al. 2013. “Multi-sensors Modules in SiGeMEMS Technology.” In Smart Systems Integration 2013. Berlin, Germany: VDE.
APA
Tilmans, H., Witvrouw, A., Severi, S., Helin, P., Erismis, M., Haspeslagh, L., Op de Beeck, M., et al. (2013). Multi-sensors modules in SiGeMEMS technology. Smart systems integration 2013. Presented at the Smart Systems Integration 2013, Berlin, Germany: VDE.
Vancouver
1.
Tilmans H, Witvrouw A, Severi S, Helin P, Erismis M, Haspeslagh L, et al. Multi-sensors modules in SiGeMEMS technology. Smart systems integration 2013. Berlin, Germany: VDE; 2013.
MLA
Tilmans, HAC, A Witvrouw, S Severi, et al. “Multi-sensors Modules in SiGeMEMS Technology.” Smart Systems Integration 2013. Berlin, Germany: VDE, 2013. Print.
@inproceedings{3169344,
  author       = {Tilmans, HAC and Witvrouw, A and Severi, S and Helin, P and Erismis, MA and Haspeslagh, L and Op de Beeck, Maaike and Sterken, Tom and Rochus, V and Yazicioglu, RF and Donnay, S and Van Hoof, C and Rottenberg, X},
  booktitle    = {Smart systems integration 2013},
  isbn         = {9783800734900},
  keyword      = {SiGe,accelerometer,MEMS,CMOS,gyroscope},
  language     = {eng},
  location     = {Amsterdam, The Netherlands},
  pages        = {8},
  publisher    = {VDE},
  title        = {Multi-sensors modules in SiGeMEMS technology},
  year         = {2013},
}