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Dissection of the Planar Magnetron Discharge

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER
(2003) Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters.
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Citation

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MLA
Buyle, Guy, et al. “Dissection of the Planar Magnetron Discharge.” Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters, Society of Vacuum Coaters, 2003, doi:1854/3235.
APA
Buyle, G., Depla, D., Eufinger, K., Haemers, J., De Gryse, R., & DE BOSSCHER, W. (2003). Dissection of the Planar Magnetron Discharge. Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters. https://doi.org/1854/3235
Chicago author-date
Buyle, Guy, Diederik Depla, Karin Eufinger, Johan Haemers, Roger De Gryse, and W DE BOSSCHER. 2003. “Dissection of the Planar Magnetron Discharge.” In Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters. Society of Vacuum Coaters. https://doi.org/1854/3235.
Chicago author-date (all authors)
Buyle, Guy, Diederik Depla, Karin Eufinger, Johan Haemers, Roger De Gryse, and W DE BOSSCHER. 2003. “Dissection of the Planar Magnetron Discharge.” In Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters. Society of Vacuum Coaters. doi:1854/3235.
Vancouver
1.
Buyle G, Depla D, Eufinger K, Haemers J, De Gryse R, DE BOSSCHER W. Dissection of the Planar Magnetron Discharge. In: Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters. Society of Vacuum Coaters; 2003.
IEEE
[1]
G. Buyle, D. Depla, K. Eufinger, J. Haemers, R. De Gryse, and W. DE BOSSCHER, “Dissection of the Planar Magnetron Discharge,” in Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters, 2003.
@inproceedings{315921,
  author       = {{Buyle, Guy and Depla, Diederik and Eufinger, Karin and Haemers, Johan and De Gryse, Roger and DE BOSSCHER, W}},
  booktitle    = {{Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters}},
  issn         = {{1099-4718}},
  language     = {{und}},
  publisher    = {{Society of Vacuum Coaters}},
  title        = {{Dissection of the Planar Magnetron Discharge}},
  url          = {{http://doi.org/1854/3235}},
  year         = {{2003}},
}
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