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Texture effects in solid-state reactions of thin films

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Abstract
The texture of thin films, originating from a solid state reaction between a deposited film and a single crystal substrate is investigated. The relation between the phase formation and texture is analyzed for a number of these systems, such as Co/Si, Ni/Si or Co/Ge, where a metal film is allowed to react with a semiconductor single crystal substrate during heating and a summary of these results in presented in this article. It was found that the texture of the resulting films can be very complex, consisting of a variety of simultaneously occurring texture components such as epitaxy, fiber and axiotaxy texture. The close connection between the phase formation and texture is demonstrated by the fact that even a small intervention in either one, can have a huge effect on the resulting phase and/or its texture. From this, we show that the effect of the addition of ternary elements (e.g. Pt, W, C) to the thin films can only be understood if one considers its effects on both the kinetics and the thermodynamics of the reactions, as well as on the texture of the phases. We show how this can be used to influence technologically important properties of the films, such of formation temperature or stability.
Keywords
NISI FILMS, SI, TEMPERATURE, THERMAL-STABILITY, agglomeration, thin film texture, pole figures, axiotaxy, epitaxy, COSI2

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Chicago
De Keyser, Koen, Christophe Detavernier, Jean-Jordan Sweet, and Christian Lavoie. 2012. “Texture Effects in Solid-state Reactions of Thin Films.” In Materials Science Forum, ed. T Chandra, M Ionescu, and D Mantovani, 706-709:2857–2862. Stafa-Zürich, Switzerland: Trans Tech Publications.
APA
De Keyser, Koen, Detavernier, C., Sweet, J.-J., & Lavoie, C. (2012). Texture effects in solid-state reactions of thin films. In T. Chandra, M. Ionescu, & D. Mantovani (Eds.), Materials Science Forum (Vol. 706–709, pp. 2857–2862). Presented at the 7th International conference on Processing and Manufacturing of Advanced Materials, Stafa-Zürich, Switzerland: Trans Tech Publications.
Vancouver
1.
De Keyser K, Detavernier C, Sweet J-J, Lavoie C. Texture effects in solid-state reactions of thin films. In: Chandra T, Ionescu M, Mantovani D, editors. Materials Science Forum. Stafa-Zürich, Switzerland: Trans Tech Publications; 2012. p. 2857–62.
MLA
De Keyser, Koen, Christophe Detavernier, Jean-Jordan Sweet, et al. “Texture Effects in Solid-state Reactions of Thin Films.” Materials Science Forum. Ed. T Chandra, M Ionescu, & D Mantovani. Vol. 706–709. Stafa-Zürich, Switzerland: Trans Tech Publications, 2012. 2857–2862. Print.
@inproceedings{3152052,
  abstract     = {The texture of thin films, originating from a solid state reaction between a deposited film and a single crystal substrate is investigated. The relation between the phase formation and texture is analyzed for a number of these systems, such as Co/Si, Ni/Si or Co/Ge, where a metal film is allowed to react with a semiconductor single crystal substrate during heating and a summary of these results in presented in this article. It was found that the texture of the resulting films can be very complex, consisting of a variety of simultaneously occurring texture components such as epitaxy, fiber and axiotaxy texture. The close connection between the phase formation and texture is demonstrated by the fact that even a small intervention in either one, can have a huge effect on the resulting phase and/or its texture. From this, we show that the effect of the addition of ternary elements (e.g. Pt, W, C) to the thin films can only be understood if one considers its effects on both the kinetics and the thermodynamics of the reactions, as well as on the texture of the phases. We show how this can be used to influence technologically important properties of the films, such of formation temperature or stability.},
  author       = {De Keyser, Koen and Detavernier, Christophe and Sweet, Jean-Jordan and Lavoie, Christian},
  booktitle    = {Materials Science Forum},
  editor       = {Chandra, T and Ionescu, M and Mantovani, D},
  issn         = {0255-5476},
  keyword      = {NISI FILMS,SI,TEMPERATURE,THERMAL-STABILITY,agglomeration,thin film texture,pole figures,axiotaxy,epitaxy,COSI2},
  language     = {eng},
  location     = {Qu{\'e}bec, QC, Canada},
  pages        = {2857--2862},
  publisher    = {Trans Tech Publications},
  title        = {Texture effects in solid-state reactions of thin films},
  url          = {http://dx.doi.org/10.4028/www.scientific.net/MSF.706-709.2857},
  volume       = {706-709},
  year         = {2012},
}

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