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Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate

Jan Musschoot (UGent) , Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , G Buyle and Christophe Detavernier (UGent)
(2012) SURFACE & COATINGS TECHNOLOGY. 206(22). p.4511-4517
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Keywords
Atomic layer deposition, ALD, Conformality, Plasma, Textile, Fibers, AL2O3, OXIDE, TEXTILES, COATINGS

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Chicago
Musschoot, Jan, Jolien Dendooven, Davy Deduytsche, Johan Haemers, G Buyle, and Christophe Detavernier. 2012. “Conformality of Thermal and Plasma Enhanced Atomic Layer Deposition on a Non-woven Fibrous Substrate.” Surface & Coatings Technology 206 (22): 4511–4517.
APA
Musschoot, J., Dendooven, J., Deduytsche, D., Haemers, J., Buyle, G., & Detavernier, C. (2012). Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate. SURFACE & COATINGS TECHNOLOGY, 206(22), 4511–4517.
Vancouver
1.
Musschoot J, Dendooven J, Deduytsche D, Haemers J, Buyle G, Detavernier C. Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate. SURFACE & COATINGS TECHNOLOGY. 2012;206(22):4511–7.
MLA
Musschoot, Jan, Jolien Dendooven, Davy Deduytsche, et al. “Conformality of Thermal and Plasma Enhanced Atomic Layer Deposition on a Non-woven Fibrous Substrate.” SURFACE & COATINGS TECHNOLOGY 206.22 (2012): 4511–4517. Print.
@article{3152044,
  author       = {Musschoot, Jan and Dendooven, Jolien and Deduytsche, Davy and Haemers, Johan and Buyle, G and Detavernier, Christophe},
  issn         = {0257-8972},
  journal      = {SURFACE \& COATINGS TECHNOLOGY},
  keyword      = {Atomic layer deposition,ALD,Conformality,Plasma,Textile,Fibers,AL2O3,OXIDE,TEXTILES,COATINGS},
  language     = {eng},
  number       = {22},
  pages        = {4511--4517},
  title        = {Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate},
  url          = {http://dx.doi.org/10.1016/j.surfcoat.2012.02.038},
  volume       = {206},
  year         = {2012},
}

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