Novel design and fabrication of a MEMS electrostatic vibration scavenger
- Author
- Tom Sterken (UGent) , Paolo Fiorini, Kris Baert, Gustaaf Borghs and Robert Puers
- Organization
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-3141282
- MLA
- Sterken, Tom, Paolo Fiorini, Kris Baert, et al. “Novel Design and Fabrication of a MEMS Electrostatic Vibration Scavenger.” Fourth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2004). 2004. 18–21. Print.
- APA
- Sterken, T., Fiorini, P., Baert, K., Borghs, G., & Puers, R. (2004). Novel design and fabrication of a MEMS electrostatic vibration scavenger. Fourth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2004) (pp. 18–21). Presented at the 4th International workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2004).
- Chicago author-date
- Sterken, Tom, Paolo Fiorini, Kris Baert, Gustaaf Borghs, and Robert Puers. 2004. “Novel Design and Fabrication of a MEMS Electrostatic Vibration Scavenger.” In Fourth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2004), 18–21.
- Chicago author-date (all authors)
- Sterken, Tom, Paolo Fiorini, Kris Baert, Gustaaf Borghs, and Robert Puers. 2004. “Novel Design and Fabrication of a MEMS Electrostatic Vibration Scavenger.” In Fourth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2004), 18–21.
- Vancouver
- 1.Sterken T, Fiorini P, Baert K, Borghs G, Puers R. Novel design and fabrication of a MEMS electrostatic vibration scavenger. Fourth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2004). 2004. p. 18–21.
- IEEE
- [1]T. Sterken, P. Fiorini, K. Baert, G. Borghs, and R. Puers, “Novel design and fabrication of a MEMS electrostatic vibration scavenger,” in Fourth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2004), Kyoto, Japan, 2004, pp. 18–21.
@inproceedings{3141282,
author = {Sterken, Tom and Fiorini, Paolo and Baert, Kris and Borghs, Gustaaf and Puers, Robert},
booktitle = {Fourth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2004)},
language = {eng},
location = {Kyoto, Japan},
pages = {18--21},
title = {Novel design and fabrication of a MEMS electrostatic vibration scavenger},
year = {2004},
}