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MEMS, model, simulation, piezoelectric scavenger, packaging

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Citation

Please use this url to cite or link to this publication:

Chicago
Schmitz, Andreas, Tom Sterken, Michael Renaud, Paolo Fiorini, Robert Puers, and Chris Van Hoof. 2005. “Piezoelectric Scavengers in MEMS Technology : Fabrication and Simulation.” In Fifth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2005), 61–64. Tokyo, Japan: University of Tokyo.
APA
Schmitz, A., Sterken, T., Renaud, M., Fiorini, P., Puers, R., & Van Hoof, C. (2005). Piezoelectric scavengers in MEMS technology : fabrication and simulation. Fifth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2005) (pp. 61–64). Presented at the 5th International workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2005), Tokyo, Japan: University of Tokyo.
Vancouver
1.
Schmitz A, Sterken T, Renaud M, Fiorini P, Puers R, Van Hoof C. Piezoelectric scavengers in MEMS technology : fabrication and simulation. Fifth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2005). Tokyo, Japan: University of Tokyo; 2005. p. 61–4.
MLA
Schmitz, Andreas, Tom Sterken, Michael Renaud, et al. “Piezoelectric Scavengers in MEMS Technology : Fabrication and Simulation.” Fifth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2005). Tokyo, Japan: University of Tokyo, 2005. 61–64. Print.
@inproceedings{3141272,
  author       = {Schmitz, Andreas and Sterken, Tom and Renaud, Michael and Fiorini, Paolo and Puers, Robert and Van Hoof, Chris},
  booktitle    = {Fifth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2005)},
  keyword      = {MEMS,model,simulation,piezoelectric scavenger,packaging},
  language     = {eng},
  location     = {Tokyo, Japan},
  pages        = {61--64},
  publisher    = {University of Tokyo},
  title        = {Piezoelectric scavengers in MEMS technology : fabrication and simulation},
  year         = {2005},
}