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Piezoelectric scavengers in MEMS technology : fabrication and simulation

Andreas Schmitz, Tom Sterken UGent, Michael Renaud, Paolo Fiorini, Robert Puers and Chris Van Hoof (2005) Fifth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2005). p.61-64
Please use this url to cite or link to this publication:
author
organization
year
type
conference (other)
publication status
published
subject
keyword
MEMS, model, simulation, piezoelectric scavenger, packaging
in
Fifth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2005)
pages
61 - 64
publisher
University of Tokyo
place of publication
Tokyo, Japan
conference name
5th International workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2005)
conference location
Tokyo, Japan
conference start
2005-11-28
conference end
2005-11-30
language
English
UGent publication?
no
classification
C1
copyright statement
I have transferred the copyright for this publication to the publisher
id
3141272
handle
http://hdl.handle.net/1854/LU-3141272
date created
2013-02-25 09:45:36
date last changed
2018-06-25 10:58:18
@inproceedings{3141272,
  author       = {Schmitz, Andreas and Sterken, Tom and Renaud, Michael and Fiorini, Paolo and Puers, Robert and Van Hoof, Chris},
  booktitle    = {Fifth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2005)},
  keyword      = {MEMS,model,simulation,piezoelectric scavenger,packaging},
  language     = {eng},
  location     = {Tokyo, Japan},
  pages        = {61--64},
  publisher    = {University of Tokyo},
  title        = {Piezoelectric scavengers in MEMS technology : fabrication and simulation},
  year         = {2005},
}

Chicago
Schmitz, Andreas, Tom Sterken, Michael Renaud, Paolo Fiorini, Robert Puers, and Chris Van Hoof. 2005. “Piezoelectric Scavengers in MEMS Technology : Fabrication and Simulation.” In Fifth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2005), 61–64. Tokyo, Japan: University of Tokyo.
APA
Schmitz, A., Sterken, T., Renaud, M., Fiorini, P., Puers, R., & Van Hoof, C. (2005). Piezoelectric scavengers in MEMS technology : fabrication and simulation. Fifth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2005) (pp. 61–64). Presented at the 5th International workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2005), Tokyo, Japan: University of Tokyo.
Vancouver
1.
Schmitz A, Sterken T, Renaud M, Fiorini P, Puers R, Van Hoof C. Piezoelectric scavengers in MEMS technology : fabrication and simulation. Fifth international workshop on micro and nanotechnology for power generation and energy conversion applications (PowerMEMS 2005). Tokyo, Japan: University of Tokyo; 2005. p. 61–4.
MLA
Schmitz, Andreas, Tom Sterken, Michael Renaud, et al. “Piezoelectric Scavengers in MEMS Technology : Fabrication and Simulation.” Fifth International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2005). Tokyo, Japan: University of Tokyo, 2005. 61–64. Print.