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Characterization of an electrostatic vibration harvester

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Abstract
Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy of a vibration into electrical energy by means of a variable capacitor, which is polarized by an electret. A lumped element model is used to study the generator and design a prototype. The device has been micromachined in silicon, based on a two-wafer process. The prototype was successfully tested, both using an external polarization source and an electret.

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Citation

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Chicago
Sterken, Tom, Geert Altena, Paolo Fiorini, and Robert Puers. 2007. “Characterization of an Electrostatic Vibration Harvester.” In DTIP 2007 : Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2007, 297–300. EDA.
APA
Sterken, T., Altena, G., Fiorini, P., & Puers, R. (2007). Characterization of an electrostatic vibration harvester. DTIP 2007 : symposium on design, test, integration and packaging of MEMS/MOEMS 2007 (pp. 297–300). Presented at the 2007 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2007), EDA.
Vancouver
1.
Sterken T, Altena G, Fiorini P, Puers R. Characterization of an electrostatic vibration harvester. DTIP 2007 : symposium on design, test, integration and packaging of MEMS/MOEMS 2007. EDA; 2007. p. 297–300.
MLA
Sterken, Tom et al. “Characterization of an Electrostatic Vibration Harvester.” DTIP 2007 : Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2007. EDA, 2007. 297–300. Print.
@inproceedings{3141109,
  abstract     = {Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy of a vibration into electrical energy by means of a variable capacitor, which is polarized by an electret. A lumped element model is used to study the generator and design a prototype. The device has been micromachined in silicon, based on a two-wafer process. The prototype was successfully tested, both using an external polarization source and an electret.},
  author       = {Sterken, Tom and Altena, Geert and Fiorini, Paolo and Puers, Robert},
  booktitle    = {DTIP 2007 : symposium on design, test, integration and packaging of MEMS/MOEMS 2007},
  isbn         = {9782355000003},
  language     = {eng},
  location     = {Stresa, Italy},
  pages        = {297--300},
  publisher    = {EDA},
  title        = {Characterization of an electrostatic vibration harvester},
  year         = {2007},
}