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Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas

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A09/TT/0243
Keywords
plasma, Platinum, Atomic layer deposition

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Citation

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Chicago
Longrie, Delphine, Kilian Devloo-Casier, Davy Deduytsche, Sven Van den Berghe, Kris Driesen, and Christophe Detavernier. 2012. “Plasma-enhanced ALD of Platinum with O₂, N₂ and NH₃ Plasmas.” Ecs Journal of Solid State Science and Technology 1 (6): Q123–Q129.
APA
Longrie, D., Devloo-Casier, K., Deduytsche, D., Van den Berghe, S., Driesen, K., & Detavernier, C. (2012). Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 1(6), Q123–Q129.
Vancouver
1.
Longrie D, Devloo-Casier K, Deduytsche D, Van den Berghe S, Driesen K, Detavernier C. Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 2012;1(6):Q123–Q129.
MLA
Longrie, Delphine, Kilian Devloo-Casier, Davy Deduytsche, et al. “Plasma-enhanced ALD of Platinum with O₂, N₂ and NH₃ Plasmas.” ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY 1.6 (2012): Q123–Q129. Print.
@article{3048837,
  author       = {Longrie, Delphine and Devloo-Casier, Kilian and Deduytsche, Davy and Van den Berghe, Sven and Driesen, Kris and Detavernier, Christophe},
  issn         = {2162-8769},
  journal      = {ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY},
  keywords     = {plasma,Platinum,Atomic layer deposition},
  language     = {eng},
  number       = {6},
  pages        = {Q123--Q129},
  title        = {Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas},
  url          = {http://dx.doi.org/10.1149/1.009206jss},
  volume       = {1},
  year         = {2012},
}

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