Impact of direct plasma hydrogenation on thermal donor formation in n-type CZ silicon
- Author
- JM RAFI, E SIMOEN, C CLAEYS, YL HUANG, AG ULYASHIN, R JOB, Jorg Versluys, Paul Clauws (UGent) , M LOZANO and F CAMPABADAL
- Organization
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-302436
- MLA
- RAFI, JM, et al. “Impact of Direct Plasma Hydrogenation on Thermal Donor Formation in N-Type CZ Silicon.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 152, no. 1, ELECTROCHEMICAL SOC INC, 2005, p. 16.
- APA
- RAFI, J., SIMOEN, E., CLAEYS, C., HUANG, Y., ULYASHIN, A., JOB, R., … CAMPABADAL, F. (2005). Impact of direct plasma hydrogenation on thermal donor formation in n-type CZ silicon. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 152(1), 16.
- Chicago author-date
- RAFI, JM, E SIMOEN, C CLAEYS, YL HUANG, AG ULYASHIN, R JOB, Jorg Versluys, Paul Clauws, M LOZANO, and F CAMPABADAL. 2005. “Impact of Direct Plasma Hydrogenation on Thermal Donor Formation in N-Type CZ Silicon.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY 152 (1): 16.
- Chicago author-date (all authors)
- RAFI, JM, E SIMOEN, C CLAEYS, YL HUANG, AG ULYASHIN, R JOB, Jorg Versluys, Paul Clauws, M LOZANO, and F CAMPABADAL. 2005. “Impact of Direct Plasma Hydrogenation on Thermal Donor Formation in N-Type CZ Silicon.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY 152 (1): 16.
- Vancouver
- 1.RAFI J, SIMOEN E, CLAEYS C, HUANG Y, ULYASHIN A, JOB R, et al. Impact of direct plasma hydrogenation on thermal donor formation in n-type CZ silicon. JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 2005;152(1):16.
- IEEE
- [1]J. RAFI et al., “Impact of direct plasma hydrogenation on thermal donor formation in n-type CZ silicon,” JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 152, no. 1, p. 16, 2005.
@article{302436,
author = {{RAFI, JM and SIMOEN, E and CLAEYS, C and HUANG, YL and ULYASHIN, AG and JOB, R and Versluys, Jorg and Clauws, Paul and LOZANO, M and CAMPABADAL, F}},
issn = {{0013-4651}},
journal = {{JOURNAL OF THE ELECTROCHEMICAL SOCIETY}},
language = {{eng}},
number = {{1}},
pages = {{G16-G24}},
publisher = {{ELECTROCHEMICAL SOC INC}},
title = {{Impact of direct plasma hydrogenation on thermal donor formation in n-type CZ silicon}},
volume = {{152}},
year = {{2005}},
}