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Grating couplers in polymer with a thin Si3N4 layer embeded

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Abstract
Polymer has been considered to be an ideal material option for integrated photonics devices. To measure these devices, normally the route of horizontal coupling is chosen to couple the light into or out of the polymer waveguide. Due to the relatively low refractive index, implementing the surface grating coupler in this material system remains to be a challenge. In this paper, we present a polymer based surface grating coupler. Rather than expensive CMOS fabrication, the device is fabricated through a simple and fast UV based soft imprint technique utilizing self-developed low loss polymer material. The coupling efficiency is enhanced by embedding a thin Si3N4 layer between the waveguide core and under cladding layer. Around -19.8dB insertion loss from single-mode fiber (SMF) to single-mode fiber is obtained for a straight waveguide with grating coupler at each end. If collected with multi-mode fiber (MMF), it can be reduced to around -17.3dB. The 3dB bandwidth is 32nm centered at 1550nm. The proposed surface grating coupler and its easy fabrication method would be attractive for practical applications.
Keywords
MICRORING RESONATORS, WAVE-GUIDES, LITHOGRAPHY, polymer waveguide, surface grating coupler, inverted-rib waveguide, coupling efficiency

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Citation

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Chicago
Wang, Linghua, Yanlu Li, Marco G Porcel, Diedrik Vermeulen, Xiuyou Han, Jinyan Wang, Xigao Jian, Mingshan Zhao, and Geert Morthier. 2012. “Grating Couplers in Polymer with a Thin Si3N4 Layer Embeded.” In Proceedings of Spie, the International Society for Optical Engineering, ed. C Tabor, F Kajzar, T Kaino, and Y Koike. Vol. 8258. Ghent, Belgium: Ghent University, Department of Information technology.
APA
Wang, Linghua, Li, Y., Porcel, M. G., Vermeulen, D., Han, X., Wang, J., Jian, X., et al. (2012). Grating couplers in polymer with a thin Si3N4 layer embeded. In C. Tabor, F. Kajzar, T. Kaino, & Y. Koike (Eds.), PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING (Vol. 8258). Presented at the Conference on Organic Photonic Materials and Devices XIV, Ghent, Belgium: Ghent University, Department of Information technology.
Vancouver
1.
Wang L, Li Y, Porcel MG, Vermeulen D, Han X, Wang J, et al. Grating couplers in polymer with a thin Si3N4 layer embeded. In: Tabor C, Kajzar F, Kaino T, Koike Y, editors. PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. Ghent, Belgium: Ghent University, Department of Information technology; 2012.
MLA
Wang, Linghua, Yanlu Li, Marco G Porcel, et al. “Grating Couplers in Polymer with a Thin Si3N4 Layer Embeded.” Proceedings of Spie, the International Society for Optical Engineering. Ed. C Tabor et al. Vol. 8258. Ghent, Belgium: Ghent University, Department of Information technology, 2012. Print.
@inproceedings{3007143,
  abstract     = {Polymer has been considered to be an ideal material option for integrated photonics devices. To measure these devices, normally the route of horizontal coupling is chosen to couple the light into or out of the polymer waveguide. Due to the relatively low refractive index, implementing the surface grating coupler in this material system remains to be a challenge. In this paper, we present a polymer based surface grating coupler. Rather than expensive CMOS fabrication, the device is fabricated through a simple and fast UV based soft imprint technique utilizing self-developed low loss polymer material. The coupling efficiency is enhanced by embedding a thin Si3N4 layer between the waveguide core and under cladding layer. Around -19.8dB insertion loss from single-mode fiber (SMF) to single-mode fiber is obtained for a straight waveguide with grating coupler at each end. If collected with multi-mode fiber (MMF), it can be reduced to around -17.3dB. The 3dB bandwidth is 32nm centered at 1550nm. The proposed surface grating coupler and its easy fabrication method would be attractive for practical applications.},
  articleno    = {825817},
  author       = {Wang, Linghua and Li, Yanlu and Porcel, Marco G and Vermeulen, Diedrik and Han, Xiuyou and Wang, Jinyan and Jian, Xigao and Zhao, Mingshan and Morthier, Geert},
  booktitle    = {PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING},
  editor       = {Tabor, C and Kajzar, F and Kaino, T and Koike, Y },
  isbn         = {9780819489012},
  issn         = {0277-786X},
  keyword      = {MICRORING RESONATORS,WAVE-GUIDES,LITHOGRAPHY,polymer waveguide,surface grating coupler,inverted-rib waveguide,coupling efficiency},
  language     = {eng},
  location     = {San Francisco, CA, USA},
  pages        = {7},
  publisher    = {Ghent University, Department of Information technology},
  title        = {Grating couplers in polymer with a thin Si3N4 layer embeded},
  url          = {http://dx.doi.org/10.1117/12.908553},
  volume       = {8258},
  year         = {2012},
}

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