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Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform

Peter Verheyen, Guy Lepage, Joris Van Campenhout, Marianna Pantouvaki, Philippe Absil, Peter De Heyn UGent, Wim Bogaerts UGent, Pieter Dumon UGent and shankar kumar Selvaraja UGent (2012) PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 8431. p.8431-8439
abstract
A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Proc. SPIE Int. Soc. Opt. Eng.
editor
L Vivien, SK Honkanen, L Pavesi and S Pelli
volume
8431
article_number
843114
pages
8431 - 8439
publisher
Ghent University, Department of Information technology
place of publication
Ghent, Belgium
conference name
Conference on Silicon Photonics and Photonic Integrated Circuits III
conference location
Brussels, Belgium
conference start
2012-04-16
conference end
2012-04-19
Web of Science type
Proceedings Paper
Web of Science id
000305452700023
ISSN
0277-786X
ISBN
9780819491237
DOI
10.1117/12.921747
language
English
UGent publication?
yes
classification
P1
copyright statement
I have transferred the copyright for this publication to the publisher
id
3007070
handle
http://hdl.handle.net/1854/LU-3007070
date created
2012-10-05 09:07:13
date last changed
2013-06-04 15:27:07
@inproceedings{3007070,
  abstract     = {A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow.},
  articleno    = {843114},
  author       = {Verheyen, Peter and Lepage, Guy and Van Campenhout, Joris and Pantouvaki, Marianna and Absil, Philippe and De Heyn, Peter and Bogaerts, Wim and Dumon, Pieter and Selvaraja, shankar kumar},
  booktitle    = {PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING},
  editor       = {Vivien, L and Honkanen, SK and Pavesi, L and Pelli, S},
  isbn         = {9780819491237},
  issn         = {0277-786X},
  language     = {eng},
  location     = {Brussels, Belgium},
  pages        = {843114:8431--843114:8439},
  publisher    = {Ghent University, Department of Information technology},
  title        = {Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform},
  url          = {http://dx.doi.org/10.1117/12.921747},
  volume       = {8431},
  year         = {2012},
}

Chicago
Verheyen, Peter, Guy Lepage, Joris Van Campenhout, Marianna Pantouvaki, Philippe Absil, Peter De Heyn, Wim Bogaerts, Pieter Dumon, and shankar kumar Selvaraja. 2012. “Co-integration of Ge Detectors and Si Modulators in an Advanced Si Photonics Platform.” In Proceedings of Spie, the International Society for Optical Engineering, ed. L Vivien, SK Honkanen, L Pavesi, and S Pelli, 8431:8431–8439. Ghent, Belgium: Ghent University, Department of Information technology.
APA
Verheyen, P., Lepage, G., Van Campenhout, J., Pantouvaki, M., Absil, P., De Heyn, P., Bogaerts, W., et al. (2012). Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform. In L. Vivien, S. Honkanen, L. Pavesi, & S. Pelli (Eds.), PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING (Vol. 8431, pp. 8431–8439). Presented at the Conference on Silicon Photonics and Photonic Integrated Circuits III, Ghent, Belgium: Ghent University, Department of Information technology.
Vancouver
1.
Verheyen P, Lepage G, Van Campenhout J, Pantouvaki M, Absil P, De Heyn P, et al. Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform. In: Vivien L, Honkanen S, Pavesi L, Pelli S, editors. PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. Ghent, Belgium: Ghent University, Department of Information technology; 2012. p. 8431–9.
MLA
Verheyen, Peter, Guy Lepage, Joris Van Campenhout, et al. “Co-integration of Ge Detectors and Si Modulators in an Advanced Si Photonics Platform.” Proceedings of Spie, the International Society for Optical Engineering. Ed. L Vivien et al. Vol. 8431. Ghent, Belgium: Ghent University, Department of Information technology, 2012. 8431–8439. Print.