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Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors

shankar kumar Selvaraja UGent, Gayle Murdoch, Alexey Milenin, Christie Delvaux, Patrick Ong, Shibnath Pathak UGent, Diedrik Vermeulen UGent, Gunther Sterckx, Gustaf Winroth and Peter Verheyen, et al. (2012) 17th Opto-Electronics and Communications Conference, Abstracts. p.15-16
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
17th Opto-Electronics and Communications Conference, Abstracts
pages
15 - 16
publisher
IEEE
conference name
17th Opto-Electronics and Communications Conference (OECC - 2012)
conference location
Busan, Korea
conference start
2012-07-02
conference end
2012-07-06
ISBN
9781467309783
language
English
UGent publication?
yes
classification
C3
copyright statement
I have transferred the copyright for this publication to the publisher
id
2996715
handle
http://hdl.handle.net/1854/LU-2996715
date created
2012-09-21 10:58:43
date last changed
2012-09-26 09:22:44
@inproceedings{2996715,
  author       = {Selvaraja, shankar kumar and Murdoch, Gayle and Milenin, Alexey and Delvaux, Christie and Ong, Patrick and Pathak, Shibnath and Vermeulen, Diedrik and Sterckx, Gunther and Winroth, Gustaf and Verheyen, Peter and Lepage, Guy and Bogaerts, Wim and Baets, Roel and Van Campenhout, Joris and Absil, Philippe},
  booktitle    = {17th Opto-Electronics and Communications Conference, Abstracts},
  isbn         = {9781467309783},
  language     = {eng},
  location     = {Busan, Korea},
  pages        = {15--16},
  publisher    = {IEEE},
  title        = {Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors},
  year         = {2012},
}

Chicago
Selvaraja, shankar kumar, Gayle Murdoch, Alexey Milenin, Christie Delvaux, Patrick Ong, Shibnath Pathak, Diedrik Vermeulen, et al. 2012. “Advanced 300-mm Waferscale Patterning for Silicon Photonics Devices with Record Low Loss and Phase Errors.” In 17th Opto-Electronics and Communications Conference, Abstracts, 15–16. IEEE.
APA
Selvaraja, shankar kumar, Murdoch, G., Milenin, A., Delvaux, C., Ong, P., Pathak, S., Vermeulen, D., et al. (2012). Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors. 17th Opto-Electronics and Communications Conference, Abstracts (pp. 15–16). Presented at the 17th Opto-Electronics and Communications Conference (OECC - 2012), IEEE.
Vancouver
1.
Selvaraja shankar kumar, Murdoch G, Milenin A, Delvaux C, Ong P, Pathak S, et al. Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors. 17th Opto-Electronics and Communications Conference, Abstracts. IEEE; 2012. p. 15–6.
MLA
Selvaraja, shankar kumar, Gayle Murdoch, Alexey Milenin, et al. “Advanced 300-mm Waferscale Patterning for Silicon Photonics Devices with Record Low Loss and Phase Errors.” 17th Opto-Electronics and Communications Conference, Abstracts. IEEE, 2012. 15–16. Print.