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Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors

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Citation

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Chicago
Selvaraja, shankar kumar, Gayle Murdoch, Alexey Milenin, Christie Delvaux, Patrick Ong, Shibnath Pathak, Diedrik Vermeulen, et al. 2012. “Advanced 300-mm Waferscale Patterning for Silicon Photonics Devices with Record Low Loss and Phase Errors.” In 17th Opto-Electronics and Communications Conference, Abstracts, 15–16. IEEE.
APA
Selvaraja, shankar kumar, Murdoch, G., Milenin, A., Delvaux, C., Ong, P., Pathak, S., Vermeulen, D., et al. (2012). Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors. 17th Opto-Electronics and Communications Conference, Abstracts (pp. 15–16). Presented at the 17th Opto-Electronics and Communications Conference (OECC - 2012), IEEE.
Vancouver
1.
Selvaraja shankar kumar, Murdoch G, Milenin A, Delvaux C, Ong P, Pathak S, et al. Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors. 17th Opto-Electronics and Communications Conference, Abstracts. IEEE; 2012. p. 15–6.
MLA
Selvaraja, shankar kumar, Gayle Murdoch, Alexey Milenin, et al. “Advanced 300-mm Waferscale Patterning for Silicon Photonics Devices with Record Low Loss and Phase Errors.” 17th Opto-Electronics and Communications Conference, Abstracts. IEEE, 2012. 15–16. Print.
@inproceedings{2996715,
  author       = {Selvaraja, shankar kumar and Murdoch, Gayle and Milenin, Alexey and Delvaux, Christie and Ong, Patrick and Pathak, Shibnath and Vermeulen, Diedrik and Sterckx, Gunther and Winroth, Gustaf and Verheyen, Peter and Lepage, Guy and Bogaerts, Wim and Baets, Roel and Van Campenhout, Joris and Absil, Philippe},
  booktitle    = {17th Opto-Electronics and Communications Conference, Abstracts},
  isbn         = {9781467309783},
  language     = {eng},
  location     = {Busan, Korea},
  pages        = {15--16},
  publisher    = {IEEE},
  title        = {Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors},
  year         = {2012},
}