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Modeling the time dependency of the reactive sputter process

Koen Strijckmans UGent, Wouter Leroy UGent and Diederik Depla UGent (2012) Plasma Surface Engineering, 13th International conference, Abstracts.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
Plasma Surface Engineering, 13th International conference, Abstracts
article_number
abstract PO1050
conference name
13th International conference on Plasma Surface Engineering (PSE 2012)
conference location
Garmisch-Partenkirchen, Germany
conference start
2012-09-10
conference end
2012-09-14
language
English
UGent publication?
yes
classification
C3
copyright statement
I have retained and own the full copyright for this publication
id
2988863
handle
http://hdl.handle.net/1854/LU-2988863
date created
2012-09-18 16:26:36
date last changed
2012-09-19 11:19:15
@inproceedings{2988863,
  articleno    = {abstract PO1050},
  author       = {Strijckmans, Koen and Leroy, Wouter and Depla, Diederik},
  booktitle    = {Plasma Surface Engineering, 13th International conference, Abstracts},
  language     = {eng},
  location     = {Garmisch-Partenkirchen, Germany},
  title        = {Modeling the time dependency of the reactive sputter process},
  year         = {2012},
}

Chicago
Strijckmans, Koen, Wouter Leroy, and Diederik Depla. 2012. “Modeling the Time Dependency of the Reactive Sputter Process.” In Plasma Surface Engineering, 13th International Conference, Abstracts.
APA
Strijckmans, K., Leroy, W., & Depla, D. (2012). Modeling the time dependency of the reactive sputter process. Plasma Surface Engineering, 13th International conference, Abstracts. Presented at the 13th International conference on Plasma Surface Engineering (PSE 2012).
Vancouver
1.
Strijckmans K, Leroy W, Depla D. Modeling the time dependency of the reactive sputter process. Plasma Surface Engineering, 13th International conference, Abstracts. 2012.
MLA
Strijckmans, Koen, Wouter Leroy, and Diederik Depla. “Modeling the Time Dependency of the Reactive Sputter Process.” Plasma Surface Engineering, 13th International Conference, Abstracts. 2012. Print.