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Modeling the time dependency of the reactive sputter process

Koen Strijckmans (UGent) , Wouter Leroy (UGent) and Diederik Depla (UGent)
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Please use this url to cite or link to this publication:

Chicago
Strijckmans, Koen, Wouter Leroy, and Diederik Depla. 2012. “Modeling the Time Dependency of the Reactive Sputter Process.” In Plasma Surface Engineering, 13th International Conference, Abstracts.
APA
Strijckmans, Koen, Leroy, W., & Depla, D. (2012). Modeling the time dependency of the reactive sputter process. Plasma Surface Engineering, 13th International conference, Abstracts. Presented at the 13th International conference on Plasma Surface Engineering (PSE 2012).
Vancouver
1.
Strijckmans K, Leroy W, Depla D. Modeling the time dependency of the reactive sputter process. Plasma Surface Engineering, 13th International conference, Abstracts. 2012.
MLA
Strijckmans, Koen, Wouter Leroy, and Diederik Depla. “Modeling the Time Dependency of the Reactive Sputter Process.” Plasma Surface Engineering, 13th International Conference, Abstracts. 2012. Print.
@inproceedings{2988863,
  articleno    = {abstract PO1050},
  author       = {Strijckmans, Koen and Leroy, Wouter and Depla, Diederik},
  booktitle    = {Plasma Surface Engineering, 13th International conference, Abstracts},
  language     = {eng},
  location     = {Garmisch-Partenkirchen, Germany},
  title        = {Modeling the time dependency of the reactive sputter process},
  year         = {2012},
}