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Target poisoning during reactive magnetron sputtering: Part III: the prediction of the critical reactive gas mole fraction

Diederik Depla (UGent) and Roger De Gryse (UGent)
(2004) SURFACE & COATINGS TECHNOLOGY. 183(2-3). p.196-203
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Chicago
Depla, Diederik, and Roger De Gryse. 2004. “Target Poisoning During Reactive Magnetron Sputtering: Part III: The Prediction of the Critical Reactive Gas Mole Fraction.” Surface & Coatings Technology 183 (2-3): 196–203.
APA
Depla, D., & De Gryse, R. (2004). Target poisoning during reactive magnetron sputtering: Part III: the prediction of the critical reactive gas mole fraction. SURFACE & COATINGS TECHNOLOGY, 183(2-3), 196–203.
Vancouver
1.
Depla D, De Gryse R. Target poisoning during reactive magnetron sputtering: Part III: the prediction of the critical reactive gas mole fraction. SURFACE & COATINGS TECHNOLOGY. ELSEVIER SCIENCE SA; 2004;183(2-3):196–203.
MLA
Depla, Diederik, and Roger De Gryse. “Target Poisoning During Reactive Magnetron Sputtering: Part III: The Prediction of the Critical Reactive Gas Mole Fraction.” SURFACE & COATINGS TECHNOLOGY 183.2-3 (2004): 196–203. Print.
@article{298715,
  author       = {Depla, Diederik and De Gryse, Roger},
  issn         = {0257-8972},
  journal      = {SURFACE \& COATINGS TECHNOLOGY},
  language     = {eng},
  number       = {2-3},
  pages        = {196--203},
  publisher    = {ELSEVIER SCIENCE SA},
  title        = {Target poisoning during reactive magnetron sputtering: Part III: the prediction of the critical reactive gas mole fraction},
  volume       = {183},
  year         = {2004},
}

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