- Author
- Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , W De Bosscher and Roger De Gryse (UGent)
- Organization
- Keywords
- magnetron discharge, magnetron sputtering, modelling, simulation, SIMULATION, TRANSPORT
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-298709
- MLA
- Buyle, Guy, et al. “Simplified Model for the DC Planar Magnetron Discharge.” VACUUM, vol. 74, no. 3–4, 2004, pp. 353–58, doi:10.1016/j.vacuum.2004.01.014.
- APA
- Buyle, G., Depla, D., Eufinger, K., Haemers, J., De Bosscher, W., & De Gryse, R. (2004). Simplified model for the DC planar magnetron discharge. VACUUM, 74(3–4), 353–358. https://doi.org/10.1016/j.vacuum.2004.01.014
- Chicago author-date
- Buyle, Guy, Diederik Depla, Karin Eufinger, Johan Haemers, W De Bosscher, and Roger De Gryse. 2004. “Simplified Model for the DC Planar Magnetron Discharge.” VACUUM 74 (3–4): 353–58. https://doi.org/10.1016/j.vacuum.2004.01.014.
- Chicago author-date (all authors)
- Buyle, Guy, Diederik Depla, Karin Eufinger, Johan Haemers, W De Bosscher, and Roger De Gryse. 2004. “Simplified Model for the DC Planar Magnetron Discharge.” VACUUM 74 (3–4): 353–358. doi:10.1016/j.vacuum.2004.01.014.
- Vancouver
- 1.Buyle G, Depla D, Eufinger K, Haemers J, De Bosscher W, De Gryse R. Simplified model for the DC planar magnetron discharge. VACUUM. 2004;74(3–4):353–8.
- IEEE
- [1]G. Buyle, D. Depla, K. Eufinger, J. Haemers, W. De Bosscher, and R. De Gryse, “Simplified model for the DC planar magnetron discharge,” VACUUM, vol. 74, no. 3–4, pp. 353–358, 2004.
@article{298709,
author = {{Buyle, Guy and Depla, Diederik and Eufinger, Karin and Haemers, Johan and De Bosscher, W and De Gryse, Roger}},
issn = {{0042-207X}},
journal = {{VACUUM}},
keywords = {{magnetron discharge,magnetron sputtering,modelling,simulation,SIMULATION,TRANSPORT}},
language = {{eng}},
location = {{Kanazawa, Japan}},
number = {{3-4}},
pages = {{353--358}},
title = {{Simplified model for the DC planar magnetron discharge}},
url = {{http://doi.org/10.1016/j.vacuum.2004.01.014}},
volume = {{74}},
year = {{2004}},
}
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