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Effect of the oxyzen deficiency of ceramic TiO2-x targets on the deposition of TiO2 thin films by DC magnetron sputtering

Hilde Poelman (UGent) , H TOMASZEWSKI, Dirk Poelman (UGent) , Diederik Depla (UGent) and Roger De Gryse (UGent)
(2004) SURFACE AND INTERFACE ANALYSIS. 36(8). p.1167-1170
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Chicago
Poelman, Hilde, H TOMASZEWSKI, Dirk Poelman, Diederik Depla, and Roger De Gryse. 2004. “Effect of the Oxyzen Deficiency of Ceramic TiO2-x Targets on the Deposition of TiO2 Thin Films by DC Magnetron Sputtering.” Surface and Interface Analysis 36 (8): 1167–1170.
APA
Poelman, H., TOMASZEWSKI, H., Poelman, D., Depla, D., & De Gryse, R. (2004). Effect of the oxyzen deficiency of ceramic TiO2-x targets on the deposition of TiO2 thin films by DC magnetron sputtering. SURFACE AND INTERFACE ANALYSIS, 36(8), 1167–1170.
Vancouver
1.
Poelman H, TOMASZEWSKI H, Poelman D, Depla D, De Gryse R. Effect of the oxyzen deficiency of ceramic TiO2-x targets on the deposition of TiO2 thin films by DC magnetron sputtering. SURFACE AND INTERFACE ANALYSIS. JOHN WILEY & SONS LTD; 2004;36(8):1167–70.
MLA
Poelman, Hilde, H TOMASZEWSKI, Dirk Poelman, et al. “Effect of the Oxyzen Deficiency of Ceramic TiO2-x Targets on the Deposition of TiO2 Thin Films by DC Magnetron Sputtering.” SURFACE AND INTERFACE ANALYSIS 36.8 (2004): 1167–1170. Print.
@article{298698,
  author       = {Poelman, Hilde and TOMASZEWSKI, H and Poelman, Dirk and Depla, Diederik and De Gryse, Roger},
  issn         = {0142-2421},
  journal      = {SURFACE AND INTERFACE ANALYSIS},
  language     = {eng},
  number       = {8},
  pages        = {1167--1170},
  publisher    = {JOHN WILEY \& SONS LTD},
  title        = {Effect of the oxyzen deficiency of ceramic TiO2-x targets on the deposition of TiO2 thin films by DC magnetron sputtering},
  volume       = {36},
  year         = {2004},
}

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