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Thirty years of rotatable magnetrons

Roger De Gryse UGent, Johan Haemers UGent, Wouter Leroy UGent and Diederik Depla UGent (2012) THIN SOLID FILMS. 520(18). p.5833-5845
Please use this url to cite or link to this publication:
author
organization
year
type
journalArticle (original)
publication status
published
subject
keyword
VOLTAGE, DEPOSITION, REACTIVE MAGNETRON, ROTATING CYLINDRICAL MAGNETRON, History, Magnetron, Rotatable, Sputter deposition
journal title
THIN SOLID FILMS
Thin Solid Films
volume
520
issue
18
pages
5833 - 5845
Web of Science type
Article
Web of Science id
000306104100001
JCR category
MATERIALS SCIENCE, COATINGS & FILMS
JCR impact factor
1.604 (2012)
JCR rank
5/17 (2012)
JCR quartile
2 (2012)
ISSN
0040-6090
DOI
10.1016/j.tsf.2012.04.065
language
English
UGent publication?
yes
classification
A1
copyright statement
I have transferred the copyright for this publication to the publisher
id
2964594
handle
http://hdl.handle.net/1854/LU-2964594
date created
2012-07-29 14:08:18
date last changed
2012-08-08 14:32:17
@article{2964594,
  author       = {De Gryse, Roger and Haemers, Johan and Leroy, Wouter and Depla, Diederik},
  issn         = {0040-6090},
  journal      = {THIN SOLID FILMS},
  keyword      = {VOLTAGE,DEPOSITION,REACTIVE MAGNETRON,ROTATING CYLINDRICAL MAGNETRON,History,Magnetron,Rotatable,Sputter deposition},
  language     = {eng},
  number       = {18},
  pages        = {5833--5845},
  title        = {Thirty years of rotatable magnetrons},
  url          = {http://dx.doi.org/10.1016/j.tsf.2012.04.065},
  volume       = {520},
  year         = {2012},
}

Chicago
De Gryse, Roger, Johan Haemers, Wouter Leroy, and Diederik Depla. 2012. “Thirty Years of Rotatable Magnetrons.” Thin Solid Films 520 (18): 5833–5845.
APA
De Gryse, R., Haemers, J., Leroy, W., & Depla, D. (2012). Thirty years of rotatable magnetrons. THIN SOLID FILMS, 520(18), 5833–5845.
Vancouver
1.
De Gryse R, Haemers J, Leroy W, Depla D. Thirty years of rotatable magnetrons. THIN SOLID FILMS. 2012;520(18):5833–45.
MLA
De Gryse, Roger, Johan Haemers, Wouter Leroy, et al. “Thirty Years of Rotatable Magnetrons.” THIN SOLID FILMS 520.18 (2012): 5833–5845. Print.