Ghent University Academic Bibliography

Advanced

Nucleation and growth of copper on Ru-based substrates, II: the effect of the suppressor additive

Magi Margalit Nagar UGent, Aleksandar Radisic, Katrien Strubbe UGent and Philippe M Vereecken (2012) ECS Transactions. 41(35). p.99-110
abstract
The effect of the molecular mass (Mm) of polyethylene glycol (PEG) and its derivatives on the copper island density (Np) on ruthenium-tantalum (RuTa) alloy was investigated by utilizing scanning electron microscopy (SEM) and galvanostatic methods. The experimental results show that the island density is affected by the strength of suppression which can be modified by using different suppressor molecules. Furthermore, we use galvanostatic measurements to evaluate the suppression strength and show that potential-time transients recorded during galvanostatic deposition of Cu can be used to estimate the island density.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
keyword
suppressor, Direct copper plating
in
ECS Transactions
ECS Trans.
volume
41
issue
35
pages
99 - 110
publisher
Electrochemical Society (ECS)
place of publication
Pennington, NJ, USA
conference name
220th Electrochemical Society Meeting (ECS Fall 2011)
conference location
Boston, MA, USA
conference start
2011-10-09
conference end
2011-10-14
ISSN
1938-5862
DOI
10.1149/1.3699384
language
English
UGent publication?
yes
classification
C1
copyright statement
I have transferred the copyright for this publication to the publisher
id
2915371
handle
http://hdl.handle.net/1854/LU-2915371
date created
2012-06-22 07:27:47
date last changed
2013-04-08 13:18:22
@inproceedings{2915371,
  abstract     = {The effect of the molecular mass (Mm) of polyethylene glycol (PEG) and its derivatives on the copper island density (Np) on ruthenium-tantalum (RuTa) alloy was investigated by utilizing scanning electron microscopy (SEM) and galvanostatic methods. The experimental results show that the island density is affected by the strength of suppression which can be modified by using different suppressor molecules. Furthermore, we use galvanostatic measurements to evaluate the suppression strength and show that potential-time transients recorded during galvanostatic deposition of Cu can be used to estimate the island density.},
  author       = {Nagar, Magi Margalit and Radisic, Aleksandar  and Strubbe, Katrien and Vereecken, Philippe M},
  booktitle    = {ECS Transactions},
  issn         = {1938-5862},
  keyword      = {suppressor,Direct copper plating},
  language     = {eng},
  location     = {Boston, MA, USA},
  number       = {35},
  pages        = {99--110},
  publisher    = {Electrochemical Society (ECS)},
  title        = {Nucleation and growth of copper on Ru-based substrates, II: the effect of the suppressor additive},
  url          = {http://dx.doi.org/10.1149/1.3699384},
  volume       = {41},
  year         = {2012},
}

Chicago
Nagar, Magi Margalit, Aleksandar Radisic, Katrien Strubbe, and Philippe M Vereecken. 2012. “Nucleation and Growth of Copper on Ru-based Substrates, II: The Effect of the Suppressor Additive.” In ECS Transactions, 41:99–110. Pennington, NJ, USA: Electrochemical Society (ECS).
APA
Nagar, M. M., Radisic, A., Strubbe, K., & Vereecken, P. M. (2012). Nucleation and growth of copper on Ru-based substrates, II: the effect of the suppressor additive. ECS Transactions (Vol. 41, pp. 99–110). Presented at the 220th Electrochemical Society Meeting (ECS Fall 2011), Pennington, NJ, USA: Electrochemical Society (ECS).
Vancouver
1.
Nagar MM, Radisic A, Strubbe K, Vereecken PM. Nucleation and growth of copper on Ru-based substrates, II: the effect of the suppressor additive. ECS Transactions. Pennington, NJ, USA: Electrochemical Society (ECS); 2012. p. 99–110.
MLA
Nagar, Magi Margalit, Aleksandar Radisic, Katrien Strubbe, et al. “Nucleation and Growth of Copper on Ru-based Substrates, II: The Effect of the Suppressor Additive.” ECS Transactions. Vol. 41. Pennington, NJ, USA: Electrochemical Society (ECS), 2012. 99–110. Print.