Advanced search
1 file | 442.55 KB

Nucleation and growth of copper on Ru-based substrates, II: the effect of the suppressor additive

(2012) ECS Transactions. 41(35). p.99-110
Author
Organization
Abstract
The effect of the molecular mass (Mm) of polyethylene glycol (PEG) and its derivatives on the copper island density (Np) on ruthenium-tantalum (RuTa) alloy was investigated by utilizing scanning electron microscopy (SEM) and galvanostatic methods. The experimental results show that the island density is affected by the strength of suppression which can be modified by using different suppressor molecules. Furthermore, we use galvanostatic measurements to evaluate the suppression strength and show that potential-time transients recorded during galvanostatic deposition of Cu can be used to estimate the island density.
Keywords
suppressor, Direct copper plating

Downloads

  • (...).pdf
    • full text
    • |
    • UGent only
    • |
    • PDF
    • |
    • 442.55 KB

Citation

Please use this url to cite or link to this publication:

Chicago
Nagar, Magi Margalit, Aleksandar Radisic, Katrien Strubbe, and Philippe M Vereecken. 2012. “Nucleation and Growth of Copper on Ru-based Substrates, II: The Effect of the Suppressor Additive.” In ECS Transactions, 41:99–110. Pennington, NJ, USA: Electrochemical Society (ECS).
APA
Nagar, M. M., Radisic, A., Strubbe, K., & Vereecken, P. M. (2012). Nucleation and growth of copper on Ru-based substrates, II: the effect of the suppressor additive. ECS Transactions (Vol. 41, pp. 99–110). Presented at the 220th Electrochemical Society Meeting (ECS Fall 2011), Pennington, NJ, USA: Electrochemical Society (ECS).
Vancouver
1.
Nagar MM, Radisic A, Strubbe K, Vereecken PM. Nucleation and growth of copper on Ru-based substrates, II: the effect of the suppressor additive. ECS Transactions. Pennington, NJ, USA: Electrochemical Society (ECS); 2012. p. 99–110.
MLA
Nagar, Magi Margalit, Aleksandar Radisic, Katrien Strubbe, et al. “Nucleation and Growth of Copper on Ru-based Substrates, II: The Effect of the Suppressor Additive.” ECS Transactions. Vol. 41. Pennington, NJ, USA: Electrochemical Society (ECS), 2012. 99–110. Print.
@inproceedings{2915371,
  abstract     = {The effect of the molecular mass (Mm) of polyethylene glycol (PEG) and its derivatives on the copper island density (Np) on ruthenium-tantalum (RuTa) alloy was investigated by utilizing scanning electron microscopy (SEM) and galvanostatic methods. The experimental results show that the island density is affected by the strength of suppression which can be modified by using different suppressor molecules. Furthermore, we use galvanostatic measurements to evaluate the suppression strength and show that potential-time transients recorded during galvanostatic deposition of Cu can be used to estimate the island density.},
  author       = {Nagar, Magi Margalit and Radisic, Aleksandar  and Strubbe, Katrien and Vereecken, Philippe M},
  booktitle    = {ECS Transactions},
  isbn         = {9781607683346},
  issn         = {1938-5862},
  keywords     = {suppressor,Direct copper plating},
  language     = {eng},
  location     = {Boston, MA, USA},
  number       = {35},
  pages        = {99--110},
  publisher    = {Electrochemical Society (ECS)},
  title        = {Nucleation and growth of copper on Ru-based substrates, II: the effect of the suppressor additive},
  url          = {http://dx.doi.org/10.1149/1.3699384},
  volume       = {41},
  year         = {2012},
}

Altmetric
View in Altmetric
Web of Science
Times cited: