The adsorption of silane, disilane and trisilane on polycrystalline silicon: a transient kinetic study
- Author
- WLM WEERTS, M DE CROON and Guy Marin (UGent)
- Organization
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-264561
- MLA
- WEERTS, WLM, et al. “The Adsorption of Silane, Disilane and Trisilane on Polycrystalline Silicon: A Transient Kinetic Study.” Surface Science, 367, Pp. 321-339, 8 Figg., 4 Tabb, 1996.
- APA
- WEERTS, W., DE CROON, M., & Marin, G. (1996). The adsorption of silane, disilane and trisilane on polycrystalline silicon: a transient kinetic study.
- Chicago author-date
- WEERTS, WLM, M DE CROON, and Guy Marin. 1996. “The Adsorption of Silane, Disilane and Trisilane on Polycrystalline Silicon: A Transient Kinetic Study.” Surface Science, 367, Pp. 321-339, 8 Figg., 4 Tabb.
- Chicago author-date (all authors)
- WEERTS, WLM, M DE CROON, and Guy Marin. 1996. “The Adsorption of Silane, Disilane and Trisilane on Polycrystalline Silicon: A Transient Kinetic Study.” Surface Science, 367, Pp. 321-339, 8 Figg., 4 Tabb.
- Vancouver
- 1.WEERTS W, DE CROON M, Marin G. The adsorption of silane, disilane and trisilane on polycrystalline silicon: a transient kinetic study. Surface Science, 367, pp. 321-339, 8 figg., 4 tabb. 1996.
- IEEE
- [1]W. WEERTS, M. DE CROON, and G. Marin, “The adsorption of silane, disilane and trisilane on polycrystalline silicon: a transient kinetic study,” Surface Science, 367, pp. 321-339, 8 figg., 4 tabb. 1996.
@misc{264561,
author = {{WEERTS, WLM and DE CROON, M and Marin, Guy}},
language = {{eng}},
series = {{Surface Science, 367, pp. 321-339, 8 figg., 4 tabb}},
title = {{The adsorption of silane, disilane and trisilane on polycrystalline silicon: a transient kinetic study}},
year = {{1996}},
}