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Opportunities for Model Based Predictive Control in Semiconductor Processing Industry

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Chicago
De Keyser, Robain, and H DE WAARD. 1996. “Opportunities for Model Based Predictive Control in Semiconductor Processing Industry.” EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p.
APA
De Keyser, Robain, & DE WAARD, H. (1996). Opportunities for Model Based Predictive Control in Semiconductor Processing Industry. EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p.
Vancouver
1.
De Keyser R, DE WAARD H. Opportunities for Model Based Predictive Control in Semiconductor Processing Industry. EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p. 1996.
MLA
De Keyser, Robain, and H DE WAARD. “Opportunities for Model Based Predictive Control in Semiconductor Processing Industry.” EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p 1996 : n. pag. Print.
@misc{264409,
  author       = {De Keyser, Robain and DE WAARD, H},
  language     = {eng},
  series       = {EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p},
  title        = {Opportunities for Model Based Predictive Control in Semiconductor Processing Industry},
  year         = {1996},
}