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Opportunities for Model Based Predictive Control in Semiconductor Processing Industry

Robain De Keyser UGent and H DE WAARD (1996) EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p.
Please use this url to cite or link to this publication:
author
organization
year
type
misc
publication status
published
subject
in
EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p
language
English
UGent publication?
yes
classification
U
id
264409
handle
http://hdl.handle.net/1854/LU-264409
date created
2004-05-24 13:31:00
date last changed
2016-12-19 15:48:03
@misc{264409,
  author       = {De Keyser, Robain and DE WAARD, H},
  language     = {eng},
  series       = {EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p},
  title        = {Opportunities for Model Based Predictive Control in Semiconductor Processing Industry},
  year         = {1996},
}

Chicago
De Keyser, Robain, and H DE WAARD. 1996. “Opportunities for Model Based Predictive Control in Semiconductor Processing Industry.” EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p.
APA
De Keyser, Robain, & DE WAARD, H. (1996). Opportunities for Model Based Predictive Control in Semiconductor Processing Industry. EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p.
Vancouver
1.
De Keyser R, DE WAARD H. Opportunities for Model Based Predictive Control in Semiconductor Processing Industry. EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p. 1996.
MLA
De Keyser, Robain, and H DE WAARD. “Opportunities for Model Based Predictive Control in Semiconductor Processing Industry.” EU-ESPRIT-CIDIC Workshop on Theory and Applications of Model Based Predictive Control, Brussel, 11p 1996 : n. pag. Print.