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Novel RIE-process for high quality InP-based waveguide structures

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Chicago
OEI, YS, LH SPIEKMAN, FH GROEN, Ingrid Moerman, EG METAAL, and JW PEDERSEN. 1995. “Novel RIE-process for High Quality InP-based Waveguide Structures.” In Proceedings of the 7th European Conference on Integrated Optics, ECIO 95.
APA
OEI, Y., SPIEKMAN, L., GROEN, F., Moerman, I., METAAL, E., & PEDERSEN, J. (1995). Novel RIE-process for high quality InP-based waveguide structures. Proceedings of the 7th European Conference on Integrated Optics, ECIO 95.
Vancouver
1.
OEI Y, SPIEKMAN L, GROEN F, Moerman I, METAAL E, PEDERSEN J. Novel RIE-process for high quality InP-based waveguide structures. Proceedings of the 7th European Conference on Integrated Optics, ECIO 95. 1995.
MLA
OEI, YS, LH SPIEKMAN, FH GROEN, et al. “Novel RIE-process for High Quality InP-based Waveguide Structures.” Proceedings of the 7th European Conference on Integrated Optics, ECIO 95. 1995. Print.
@inproceedings{254145,
  author       = {OEI, YS and SPIEKMAN, LH and GROEN, FH and Moerman, Ingrid and METAAL, EG and PEDERSEN, JW},
  booktitle    = {Proceedings of the 7th European Conference on Integrated Optics, ECIO 95},
  isbn         = {90-407-1111-9, PUBLISHED BY DELFT UNIVERSITY PRESS, 3-6 APRIL 1995, DELFT, THE NETHERLANDS, PP. 205-208},
  language     = {eng},
  title        = {Novel RIE-process for high quality InP-based waveguide structures},
  year         = {1995},
}