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Chicago
RAFI, J, E SIMOEN, C CLAEYS, A ULYASHIN, R JOB, W FAHRNER, Jorg Versluys, Paul Clauws, M LOZANO, and F CAMPABADAL. 2003. “Analysis of Thermal Donor Formation in N-type CZ Silicon.” In Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes, ed. B Kolbesen, C Claeys, P Stallhofer, F Tardif, D Schroder, T Shaffner, M Tajima, and P Rai-Choudhury, 96–105. The Electrochemical Society.
APA
RAFI, J, SIMOEN, E., CLAEYS, C., ULYASHIN, A., JOB, R., FAHRNER, W., Versluys, J., et al. (2003). Analysis of thermal donor formation in n-type CZ silicon. In B. Kolbesen, C. Claeys, P. Stallhofer, F. Tardif, D. Schroder, T. Shaffner, M. Tajima, et al. (Eds.), Analytical and diagnostic techniques for semiconductor materials, devices and processes (pp. 96–105). The Electrochemical Society.
Vancouver
1.
RAFI J, SIMOEN E, CLAEYS C, ULYASHIN A, JOB R, FAHRNER W, et al. Analysis of thermal donor formation in n-type CZ silicon. In: Kolbesen B, Claeys C, Stallhofer P, Tardif F, Schroder D, Shaffner T, et al., editors. Analytical and diagnostic techniques for semiconductor materials, devices and processes. The Electrochemical Society; 2003. p. 96–105.
MLA
RAFI, J, E SIMOEN, C CLAEYS, et al. “Analysis of Thermal Donor Formation in N-type CZ Silicon.” Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes. Ed. B Kolbesen et al. The Electrochemical Society, 2003. 96–105. Print.
@inproceedings{218537,
  author       = {RAFI, J and SIMOEN, E and CLAEYS, C and ULYASHIN, A and JOB, R and FAHRNER, W and Versluys, Jorg and Clauws, Paul and LOZANO, M and CAMPABADAL, F},
  booktitle    = {Analytical and diagnostic techniques for semiconductor materials, devices and processes},
  editor       = {Kolbesen, B and Claeys, C and Stallhofer, P and Tardif, F and Schroder, D and Shaffner, T and Tajima, M and Rai-Choudhury, P},
  language     = {eng},
  pages        = {96--105},
  publisher    = {The Electrochemical Society},
  title        = {Analysis of thermal donor formation in n-type CZ silicon},
  year         = {2003},
}