Advanced search

Room temperature grain growth in sputtered Cu films

Author
Organization

Citation

Please use this url to cite or link to this publication:

Chicago
Deduytsche, Davy, Christophe Detavernier, Jérémie De Baerdemaeker, Roland Vanmeirhaeghe, and Charles Dauwe. 2003. “Room Temperature Grain Growth in Sputtered Cu Films.” In Morphological and Compositional Evolution of Thin Films, MRS Proc. Vol. 749, 12–6.
APA
Deduytsche, D., Detavernier, C., De Baerdemaeker, J., Vanmeirhaeghe, R., & Dauwe, C. (2003). Room temperature grain growth in sputtered Cu films. Morphological and compositional evolution of thin films, MRS Proc. Vol. 749 (pp. 12–6).
Vancouver
1.
Deduytsche D, Detavernier C, De Baerdemaeker J, Vanmeirhaeghe R, Dauwe C. Room temperature grain growth in sputtered Cu films. Morphological and compositional evolution of thin films, MRS Proc. Vol. 749. 2003. p. 12–6.
MLA
Deduytsche, Davy, Christophe Detavernier, Jérémie De Baerdemaeker, et al. “Room Temperature Grain Growth in Sputtered Cu Films.” Morphological and Compositional Evolution of Thin Films, MRS Proc. Vol. 749. 2003. 12–6. Print.
@inproceedings{216687,
  author       = {Deduytsche, Davy and Detavernier, Christophe and De Baerdemaeker, J{\'e}r{\'e}mie and Vanmeirhaeghe, Roland and Dauwe, Charles},
  booktitle    = {Morphological and compositional evolution of thin films, MRS Proc. Vol. 749},
  pages        = {12--6},
  title        = {Room temperature grain growth in sputtered Cu films},
  year         = {2003},
}