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Kinetics of agglomeration of NiSi and NiSi2 phase formation

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Chicago
Detavernier, Christophe, A OZCAN, C LAVOIE, J HARPER, and J JORDAN-SWEET. 2003. “Kinetics of Agglomeration of NiSi and NiSi2 Phase Formation.” In Novel Materials and Processes for Advanced CMOS, Vol. 745, 135–140.
APA
Detavernier, C., OZCAN, A., LAVOIE, C., HARPER, J., & JORDAN-SWEET, J. (2003). Kinetics of agglomeration of NiSi and NiSi2 phase formation. Novel Materials and Processes for Advanced CMOS, Vol. 745 (pp. 135–140).
Vancouver
1.
Detavernier C, OZCAN A, LAVOIE C, HARPER J, JORDAN-SWEET J. Kinetics of agglomeration of NiSi and NiSi2 phase formation. Novel Materials and Processes for Advanced CMOS, Vol. 745. 2003. p. 135–40.
MLA
Detavernier, Christophe, A OZCAN, C LAVOIE, et al. “Kinetics of Agglomeration of NiSi and NiSi2 Phase Formation.” Novel Materials and Processes for Advanced CMOS, Vol. 745. 2003. 135–140. Print.
@inproceedings{216682,
  author       = {Detavernier, Christophe and OZCAN, A and LAVOIE, C and HARPER, J and JORDAN-SWEET, J},
  booktitle    = {Novel Materials and Processes for Advanced CMOS, Vol. 745},
  pages        = {135--140},
  title        = {Kinetics of agglomeration of NiSi and NiSi2 phase formation},
  year         = {2003},
}