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Modeling reactive magnetron sputtering: fixing the parameter set

Koen Strijckmans UGent, Wouter Leroy UGent, Roger De Gryse UGent and Diederik Depla UGent (2012) SURFACE & COATINGS TECHNOLOGY. 206(17). p.3666-3675
Please use this url to cite or link to this publication:
author
organization
year
type
journalArticle (original)
publication status
published
subject
keyword
DEPOSITION, SIMULATION, COEFFICIENT, ION ENERGY, DISCHARGE VOLTAGE, ATOMIC OXYGEN, Yttrium, Modeling, Aluminum, Reactive sputtering, OXIDATION, STICKING, O-2
journal title
SURFACE & COATINGS TECHNOLOGY
Surf. Coat. Technol.
volume
206
issue
17
pages
3666 - 3675
Web of Science type
Article
Web of Science id
000303644900016
JCR category
MATERIALS SCIENCE, COATINGS & FILMS
JCR impact factor
1.941 (2012)
JCR rank
3/17 (2012)
JCR quartile
1 (2012)
ISSN
0257-8972
DOI
10.1016/j.surfcoat.2012.03.019
language
English
UGent publication?
yes
classification
A1
additional info
correction published in: Surf. Coat. Technol. (2015) 278, 126 ; DOI 10.1016/j.surfcoat.2015.07.064
copyright statement
I have transferred the copyright for this publication to the publisher
id
2112621
handle
http://hdl.handle.net/1854/LU-2112621
date created
2012-05-24 17:07:05
date last changed
2016-12-19 15:42:54
@article{2112621,
  author       = {Strijckmans, Koen and Leroy, Wouter and De Gryse, Roger and Depla, Diederik},
  issn         = {0257-8972},
  journal      = {SURFACE \& COATINGS TECHNOLOGY},
  keyword      = {DEPOSITION,SIMULATION,COEFFICIENT,ION ENERGY,DISCHARGE VOLTAGE,ATOMIC OXYGEN,Yttrium,Modeling,Aluminum,Reactive sputtering,OXIDATION,STICKING,O-2},
  language     = {eng},
  number       = {17},
  pages        = {3666--3675},
  title        = {Modeling reactive magnetron sputtering: fixing the parameter set},
  url          = {http://dx.doi.org/10.1016/j.surfcoat.2012.03.019},
  volume       = {206},
  year         = {2012},
}

Chicago
Strijckmans, Koen, Wouter Leroy, Roger De Gryse, and Diederik Depla. 2012. “Modeling Reactive Magnetron Sputtering: Fixing the Parameter Set.” Surface & Coatings Technology 206 (17): 3666–3675.
APA
Strijckmans, Koen, Leroy, W., De Gryse, R., & Depla, D. (2012). Modeling reactive magnetron sputtering: fixing the parameter set. SURFACE & COATINGS TECHNOLOGY, 206(17), 3666–3675.
Vancouver
1.
Strijckmans K, Leroy W, De Gryse R, Depla D. Modeling reactive magnetron sputtering: fixing the parameter set. SURFACE & COATINGS TECHNOLOGY. 2012;206(17):3666–75.
MLA
Strijckmans, Koen, Wouter Leroy, Roger De Gryse, et al. “Modeling Reactive Magnetron Sputtering: Fixing the Parameter Set.” SURFACE & COATINGS TECHNOLOGY 206.17 (2012): 3666–3675. Print.