### Angle-resolved energy flux measurements of a HIPIMS-powered rotating cylindrical magnetron in reactive and nonreactive atmosphere

Stephanos Konstantinidis, Wouter Leroy UGent and Diederik Depla UGent (2012) p.50-50
abstract
Energy flux measurements were carried out using a passive thermal probe during sputtering of titanium in a reactive Ar/O2 atmosphere with a rotating cylindrical magnetron. The data were collected 90° around the cylindrical magnetron cathode. The rectangular voltage pulses had a duration of either 5 or 20 μs and target voltage was set to 600V in order to reach a timeaveraged power density over the racetrack of 30 W/cm². As a reference, the energy flux was also measured during DC magnetron under the same working conditions. The energy flux per adparticle was calculated by measuring the deposition rate for all sputter modes and regimes. The lowest deposition rate was measured during reactive HiPIMS, with 20μs-long pulses. However the highest energy per adparticle was measured for that particular case. This result can be understood based on the increased ion and electron fluxes on the probe surface during the HiPIMS experiments. A possible contribution to the energy flux could also originate from the presence of fast oxygen ions (0-) emitted from the target surface and accelerated in the cathode sheath. A difference in the angular distribution of the energy deposited per arriving adparticle is noticed when comparing the dc and the HIPIMS discharges. The dc mode has a maximum arriving energy per adparticle at around 50°, while the maximum is located at 60° for the HIPIMS mode.
author
organization
year
type
conference
publication status
published
subject
in
ICMCTF 2012 : 39th international conference on metallurgical coatings and thin films : program and abstracts
article number
abstract F2.2-11
pages
50 - 50
conference name
39th International conference on Metallurgical Coatings and Thin Films (ICMCTF 2012)
conference location
San Diego, CA, USA
conference start
2012-04-23
conference end
2012-04-27
language
English
UGent publication?
yes
classification
C3
I have transferred the copyright for this publication to the publisher
id
2096531
handle
http://hdl.handle.net/1854/LU-2096531
date created
2012-04-30 13:55:50
date last changed
2016-12-21 15:40:55
@inproceedings{2096531,
abstract     = {Energy flux measurements were carried out using a passive thermal probe during sputtering of titanium in a reactive Ar/O2 atmosphere with a rotating cylindrical magnetron. The data were collected 90{\textdegree} around the cylindrical magnetron cathode. The rectangular voltage pulses had a duration of either 5 or 20 \ensuremath{\mu}s and target voltage was set to 600V in order to reach a timeaveraged power density over the racetrack of 30 W/cm{\texttwosuperior}. As a reference, the energy flux was also measured during DC magnetron under the same working conditions. The energy flux per adparticle was calculated by measuring the deposition rate for all sputter modes and regimes. The lowest deposition rate was measured during reactive HiPIMS, with 20\ensuremath{\mu}s-long pulses. However the highest energy per adparticle was measured for that particular case. This result can be understood based on the increased ion and electron fluxes on the probe surface during the HiPIMS experiments. A possible contribution to the energy flux could also originate from the presence of fast oxygen ions (0-) emitted from the target surface and accelerated in the cathode sheath. A difference in the angular distribution of the energy deposited per arriving adparticle is noticed when comparing the dc and the HIPIMS discharges. The dc mode has a maximum arriving energy per adparticle at around 50{\textdegree}, while the maximum is located at 60{\textdegree} for the HIPIMS mode.},
articleno    = {abstract F2.2-11},
author       = {Konstantinidis, Stephanos and Leroy, Wouter and Snyders, Rony and Depla, Diederik},
booktitle    = {ICMCTF 2012 : 39th international conference on metallurgical coatings and thin films : program and abstracts},
language     = {eng},
location     = {San Diego, CA, USA},
pages        = {abstract F2.2-11:50--abstract F2.2-11:50},
title        = {Angle-resolved energy flux measurements of a HIPIMS-powered rotating cylindrical magnetron in reactive and nonreactive atmosphere},
year         = {2012},
}


Chicago
Konstantinidis, Stephanos, Wouter Leroy, Rony Snyders, and Diederik Depla. 2012. “Angle-resolved Energy Flux Measurements of a HIPIMS-powered Rotating Cylindrical Magnetron in Reactive and Nonreactive Atmosphere.” In ICMCTF 2012 : 39th International Conference on Metallurgical Coatings and Thin Films : Program and Abstracts, 50–50.
APA
Konstantinidis, S., Leroy, W., Snyders, R., & Depla, D. (2012). Angle-resolved energy flux measurements of a HIPIMS-powered rotating cylindrical magnetron in reactive and nonreactive atmosphere. ICMCTF 2012 : 39th international conference on metallurgical coatings and thin films : program and abstracts (pp. 50–50). Presented at the 39th International conference on Metallurgical Coatings and Thin Films (ICMCTF 2012).
Vancouver
1.
Konstantinidis S, Leroy W, Snyders R, Depla D. Angle-resolved energy flux measurements of a HIPIMS-powered rotating cylindrical magnetron in reactive and nonreactive atmosphere. ICMCTF 2012 : 39th international conference on metallurgical coatings and thin films : program and abstracts. 2012. p. 50–50.
MLA
Konstantinidis, Stephanos, Wouter Leroy, Rony Snyders, et al. “Angle-resolved Energy Flux Measurements of a HIPIMS-powered Rotating Cylindrical Magnetron in Reactive and Nonreactive Atmosphere.” ICMCTF 2012 : 39th International Conference on Metallurgical Coatings and Thin Films : Program and Abstracts. 2012. 50–50. Print.