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Recapture of secondary electrons by the target in a DC planar magnetron discharge

(2003) VACUUM. 70(1). p.29-35
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Chicago
Buyle, Guy, W DE BOSSCHER, D DOPLA, Karin Eufinger, Johan Haemers, and Roger De Gryse. 2003. “Recapture of Secondary Electrons by the Target in a DC Planar Magnetron Discharge.” Vacuum 70 (1): 29–35.
APA
Buyle, G., DE BOSSCHER, W., DOPLA, D., Eufinger, K., Haemers, J., & De Gryse, R. (2003). Recapture of secondary electrons by the target in a DC planar magnetron discharge. VACUUM, 70(1), 29–35.
Vancouver
1.
Buyle G, DE BOSSCHER W, DOPLA D, Eufinger K, Haemers J, De Gryse R. Recapture of secondary electrons by the target in a DC planar magnetron discharge. VACUUM. 2003;70(1):29–35.
MLA
Buyle, Guy, W DE BOSSCHER, D DOPLA, et al. “Recapture of Secondary Electrons by the Target in a DC Planar Magnetron Discharge.” VACUUM 70.1 (2003): 29–35. Print.
@article{208682,
  author       = {Buyle, Guy and DE BOSSCHER, W and DOPLA, D and Eufinger, Karin and Haemers, Johan and De Gryse, Roger},
  issn         = {0042-207X},
  journal      = {VACUUM},
  language     = {eng},
  number       = {1},
  pages        = {29--35},
  title        = {Recapture of secondary electrons by the target in a DC planar magnetron discharge},
  volume       = {70},
  year         = {2003},
}

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