Ghent University Academic Bibliography

Advanced

Dynamic Monte Carlo simulation for reactive sputtering of aluminium

ZY CHEN, A BOGAERTS, Diederik Depla UGent and V IGNATOVA (2003) NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. 207(4). p.415-423
Please use this url to cite or link to this publication:
author
organization
year
type
journalArticle (original)
publication status
published
subject
journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms
volume
207
issue
4
pages
415-423 pages
Web of Science type
Article
Web of Science id
000184051300006
JCR category
NUCLEAR SCIENCE & TECHNOLOGY
JCR impact factor
1.041 (2003)
JCR rank
6/33 (2003)
JCR quartile
1 (2003)
ISSN
0168-583X
language
English
UGent publication?
yes
classification
A1
id
208402
handle
http://hdl.handle.net/1854/LU-208402
date created
2008-01-11 10:41:00
date last changed
2016-12-19 15:38:01
@article{208402,
  author       = {CHEN, ZY and BOGAERTS, A and Depla, Diederik and IGNATOVA, V},
  issn         = {0168-583X},
  journal      = {NUCLEAR INSTRUMENTS \& METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS},
  language     = {eng},
  number       = {4},
  pages        = {415--423},
  title        = {Dynamic Monte Carlo simulation for reactive sputtering of aluminium},
  volume       = {207},
  year         = {2003},
}

Chicago
CHEN, ZY, A BOGAERTS, Diederik Depla, and V IGNATOVA. 2003. “Dynamic Monte Carlo Simulation for Reactive Sputtering of Aluminium.” Nuclear Instruments & Methods in Physics Research Section B-beam Interactions with Materials and Atoms 207 (4): 415–423.
APA
CHEN, ZY, BOGAERTS, A., Depla, D., & IGNATOVA, V. (2003). Dynamic Monte Carlo simulation for reactive sputtering of aluminium. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 207(4), 415–423.
Vancouver
1.
CHEN Z, BOGAERTS A, Depla D, IGNATOVA V. Dynamic Monte Carlo simulation for reactive sputtering of aluminium. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. 2003;207(4):415–23.
MLA
CHEN, ZY, A BOGAERTS, Diederik Depla, et al. “Dynamic Monte Carlo Simulation for Reactive Sputtering of Aluminium.” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 207.4 (2003): 415–423. Print.