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Dynamic Monte Carlo simulation for reactive sputtering of aluminium

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Chicago
CHEN, ZY, A BOGAERTS, Diederik Depla, and V IGNATOVA. 2003. “Dynamic Monte Carlo Simulation for Reactive Sputtering of Aluminium.” Nuclear Instruments & Methods in Physics Research Section B-beam Interactions with Materials and Atoms 207 (4): 415–423.
APA
CHEN, ZY, BOGAERTS, A., Depla, D., & IGNATOVA, V. (2003). Dynamic Monte Carlo simulation for reactive sputtering of aluminium. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 207(4), 415–423.
Vancouver
1.
CHEN Z, BOGAERTS A, Depla D, IGNATOVA V. Dynamic Monte Carlo simulation for reactive sputtering of aluminium. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. 2003;207(4):415–23.
MLA
CHEN, ZY, A BOGAERTS, Diederik Depla, et al. “Dynamic Monte Carlo Simulation for Reactive Sputtering of Aluminium.” NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 207.4 (2003): 415–423. Print.
@article{208402,
  author       = {CHEN, ZY and BOGAERTS, A and Depla, Diederik and IGNATOVA, V},
  issn         = {0168-583X},
  journal      = {NUCLEAR INSTRUMENTS \& METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS},
  language     = {eng},
  number       = {4},
  pages        = {415--423},
  title        = {Dynamic Monte Carlo simulation for reactive sputtering of aluminium},
  volume       = {207},
  year         = {2003},
}

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