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Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge

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Chicago
Buyle, Guy, Diederik Depla, Karin Eufinger, Johan Haemers, Roger De Gryse, and W DE BOSSCHER. 2003. “Simplified Model for Calculating the Pressure Dependence of a Direct Current Planar Magnetron Discharge.” Journal of Vacuum Science & Technology A 21 (4): 1218–1224.
APA
Buyle, G., Depla, D., Eufinger, K., Haemers, J., De Gryse, R., & DE BOSSCHER, W. (2003). Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 21(4), 1218–1224.
Vancouver
1.
Buyle G, Depla D, Eufinger K, Haemers J, De Gryse R, DE BOSSCHER W. Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 2003;21(4):1218–24.
MLA
Buyle, Guy, Diederik Depla, Karin Eufinger, et al. “Simplified Model for Calculating the Pressure Dependence of a Direct Current Planar Magnetron Discharge.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 21.4 (2003): 1218–1224. Print.
@article{208397,
  author       = {Buyle, Guy and Depla, Diederik and Eufinger, Karin and Haemers, Johan and De Gryse, Roger and DE BOSSCHER, W},
  issn         = {0734-2101},
  journal      = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A},
  language     = {eng},
  number       = {4},
  pages        = {1218--1224},
  title        = {Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge},
  volume       = {21},
  year         = {2003},
}

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