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Ultra-low copper baths for sub-35 nm copper interconnects

Tanya Atanasova UGent, Katrien Strubbe UGent, Laureen Carbonell, Rudy Caluwaerts, Zsolt Tokei and Philippe Vereecken (2012) ECS Transactions. 41.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
in press
subject
in
ECS Transactions
ECS Trans.
volume
41
publisher
Electrochemical Society (ECS)
place of publication
Pennington, NJ, USA
conference name
220th ECS Meeting
conference location
Boston, MA, USA
conference start
2011-10-10
conference end
2011-10-14
ISSN
1938-5862
language
English
UGent publication?
yes
classification
C1
id
2078569
handle
http://hdl.handle.net/1854/LU-2078569
date created
2012-03-30 16:58:32
date last changed
2013-04-08 13:22:15
@inproceedings{2078569,
  author       = {Atanasova, Tanya and Strubbe, Katrien and Carbonell, Laureen and Caluwaerts, Rudy and Tokei, Zsolt and Vereecken, Philippe},
  booktitle    = {ECS Transactions},
  issn         = {1938-5862},
  language     = {eng},
  location     = {Boston, MA, USA},
  publisher    = {Electrochemical Society (ECS)},
  title        = {Ultra-low copper baths for sub-35 nm copper interconnects},
  volume       = {41},
  year         = {2012},
}

Chicago
Atanasova, Tanya, Katrien Strubbe, Laureen Carbonell, Rudy Caluwaerts, Zsolt Tokei, and Philippe Vereecken. 2012. “Ultra-low Copper Baths for Sub-35 Nm Copper Interconnects.” In ECS Transactions. Vol. 41. Pennington, NJ, USA: Electrochemical Society (ECS).
APA
Atanasova, T., Strubbe, K., Carbonell, L., Caluwaerts, R., Tokei, Z., & Vereecken, P. (2012). Ultra-low copper baths for sub-35 nm copper interconnects. ECS Transactions (Vol. 41). Presented at the 220th ECS Meeting, Pennington, NJ, USA: Electrochemical Society (ECS).
Vancouver
1.
Atanasova T, Strubbe K, Carbonell L, Caluwaerts R, Tokei Z, Vereecken P. Ultra-low copper baths for sub-35 nm copper interconnects. ECS Transactions. Pennington, NJ, USA: Electrochemical Society (ECS); 2012.
MLA
Atanasova, Tanya, Katrien Strubbe, Laureen Carbonell, et al. “Ultra-low Copper Baths for Sub-35 Nm Copper Interconnects.” ECS Transactions. Vol. 41. Pennington, NJ, USA: Electrochemical Society (ECS), 2012. Print.