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TaN/Ta as an effective diffusion barrier for direct contact of copper and NiSi

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Keywords
RE, LAYER, OXIDATION, SILICIDES, TA, CU CONTACT

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Citation

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MLA
Jiang, Yu-Long, Qi Xie, Xin-Ping Qu, et al. “TaN/Ta as an Effective Diffusion Barrier for Direct Contact of Copper and NiSi.” ELECTROCHEMICAL AND SOLID STATE LETTERS 15.1 (2012): H9–H13. Print.
APA
Jiang, Y.-L., Xie, Q., Qu, X.-P., Zhang, D. W., Deduytsche, D., & Detavernier, C. (2012). TaN/Ta as an effective diffusion barrier for direct contact of copper and NiSi. ELECTROCHEMICAL AND SOLID STATE LETTERS, 15(1), H9–H13.
Chicago author-date
Jiang, Yu-Long, Qi Xie, Xin-Ping Qu, David W Zhang, Davy Deduytsche, and Christophe Detavernier. 2012. “TaN/Ta as an Effective Diffusion Barrier for Direct Contact of Copper and NiSi.” Electrochemical and Solid State Letters 15 (1): H9–H13.
Chicago author-date (all authors)
Jiang, Yu-Long, Qi Xie, Xin-Ping Qu, David W Zhang, Davy Deduytsche, and Christophe Detavernier. 2012. “TaN/Ta as an Effective Diffusion Barrier for Direct Contact of Copper and NiSi.” Electrochemical and Solid State Letters 15 (1): H9–H13.
Vancouver
1.
Jiang Y-L, Xie Q, Qu X-P, Zhang DW, Deduytsche D, Detavernier C. TaN/Ta as an effective diffusion barrier for direct contact of copper and NiSi. ELECTROCHEMICAL AND SOLID STATE LETTERS. 2012;15(1):H9–H13.
IEEE
[1]
Y.-L. Jiang, Q. Xie, X.-P. Qu, D. W. Zhang, D. Deduytsche, and C. Detavernier, “TaN/Ta as an effective diffusion barrier for direct contact of copper and NiSi,” ELECTROCHEMICAL AND SOLID STATE LETTERS, vol. 15, no. 1, pp. H9–H13, 2012.
@article{2042928,
  author       = {Jiang, Yu-Long and Xie, Qi and Qu, Xin-Ping and Zhang, David W and Deduytsche, Davy and Detavernier, Christophe},
  issn         = {1099-0062},
  journal      = {ELECTROCHEMICAL AND SOLID STATE LETTERS},
  keywords     = {RE,LAYER,OXIDATION,SILICIDES,TA,CU CONTACT},
  language     = {eng},
  number       = {1},
  pages        = {H9--H13},
  title        = {TaN/Ta as an effective diffusion barrier for direct contact of copper and NiSi},
  url          = {http://dx.doi.org/10.1149/2.020201esl},
  volume       = {15},
  year         = {2012},
}

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