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Scanning electron microscopy study of the growth mechanism of biaxially aligned magnesium oxide layers grown by unbalanced magnetron sputtering

(2005) THIN SOLID FILMS. 493(1-2). p.129-134
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microstructure, growth mechanism, unbalanced magnetron sputtering, biaxial alignment, MgO, THIN-FILMS, MGO, ORIENTATION, DEPENDENCE, TEXTURE DEVELOPMENT, YTTRIA-STABILIZED-ZIRCONIA, BEAM-ASSISTED DEPOSITION

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Citation

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Chicago
Ghekiere, Pieter, Stijn Mahieu, Griet De Winter, Roger De Gryse, and Diederik Depla. 2005. “Scanning Electron Microscopy Study of the Growth Mechanism of Biaxially Aligned Magnesium Oxide Layers Grown by Unbalanced Magnetron Sputtering.” Thin Solid Films 493 (1-2): 129–134.
APA
Ghekiere, Pieter, Mahieu, S., De Winter, G., De Gryse, R., & Depla, D. (2005). Scanning electron microscopy study of the growth mechanism of biaxially aligned magnesium oxide layers grown by unbalanced magnetron sputtering. THIN SOLID FILMS, 493(1-2), 129–134.
Vancouver
1.
Ghekiere P, Mahieu S, De Winter G, De Gryse R, Depla D. Scanning electron microscopy study of the growth mechanism of biaxially aligned magnesium oxide layers grown by unbalanced magnetron sputtering. THIN SOLID FILMS. 2005;493(1-2):129–34.
MLA
Ghekiere, Pieter, Stijn Mahieu, Griet De Winter, et al. “Scanning Electron Microscopy Study of the Growth Mechanism of Biaxially Aligned Magnesium Oxide Layers Grown by Unbalanced Magnetron Sputtering.” THIN SOLID FILMS 493.1-2 (2005): 129–134. Print.
@article{2034704,
  author       = {Ghekiere, Pieter and Mahieu, Stijn and De Winter, Griet and De Gryse, Roger and Depla, Diederik},
  issn         = {0040-6090},
  journal      = {THIN SOLID FILMS},
  keyword      = {microstructure,growth mechanism,unbalanced magnetron sputtering,biaxial alignment,MgO,THIN-FILMS,MGO,ORIENTATION,DEPENDENCE,TEXTURE DEVELOPMENT,YTTRIA-STABILIZED-ZIRCONIA,BEAM-ASSISTED DEPOSITION},
  language     = {eng},
  number       = {1-2},
  pages        = {129--134},
  title        = {Scanning electron microscopy study of the growth mechanism of biaxially aligned magnesium oxide layers grown by unbalanced magnetron sputtering},
  url          = {http://dx.doi.org/10.1016/j.tsf.2005.07.314},
  volume       = {493},
  year         = {2005},
}

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