The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering
- Author
- Wouter Leroy (UGent) and Diederik Depla (UGent)
- Organization
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-1976571
- MLA
- Leroy, Wouter, and Diederik Depla. “The Energy and Particle Fluxes during the Growth of Multifunctional ZrN Thin Films Deposited by Reactive Magnetron Sputtering.” Reactive Sputter Deposition, 10th International Symposium, Abstracts, 2011.
- APA
- Leroy, W., & Depla, D. (2011). The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering. Reactive Sputter Deposition, 10th International Symposium, Abstracts. Presented at the 10th International symposium on Reactive Sputter Deposition (RDS 2011), Linköping, Sweden.
- Chicago author-date
- Leroy, Wouter, and Diederik Depla. 2011. “The Energy and Particle Fluxes during the Growth of Multifunctional ZrN Thin Films Deposited by Reactive Magnetron Sputtering.” In Reactive Sputter Deposition, 10th International Symposium, Abstracts.
- Chicago author-date (all authors)
- Leroy, Wouter, and Diederik Depla. 2011. “The Energy and Particle Fluxes during the Growth of Multifunctional ZrN Thin Films Deposited by Reactive Magnetron Sputtering.” In Reactive Sputter Deposition, 10th International Symposium, Abstracts.
- Vancouver
- 1.Leroy W, Depla D. The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering. In: Reactive Sputter Deposition, 10th International symposium, Abstracts. 2011.
- IEEE
- [1]W. Leroy and D. Depla, “The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering,” in Reactive Sputter Deposition, 10th International symposium, Abstracts, Linköping, Sweden, 2011.
@inproceedings{1976571, author = {{Leroy, Wouter and Depla, Diederik}}, booktitle = {{Reactive Sputter Deposition, 10th International symposium, Abstracts}}, language = {{eng}}, location = {{Linköping, Sweden}}, title = {{The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering}}, year = {{2011}}, }