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The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering

Wouter Leroy UGent and Diederik Depla UGent (2011) Reactive Sputter Deposition, 10th International symposium, Abstracts.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
Reactive Sputter Deposition, 10th International symposium, Abstracts
conference name
10th International symposium on Reactive Sputter Deposition (RDS 2011)
conference location
Linköping, Sweden
conference start
2011-12-08
conference end
2011-12-09
language
English
UGent publication?
yes
classification
C3
copyright statement
I have transferred the copyright for this publication to the publisher
id
1976571
handle
http://hdl.handle.net/1854/LU-1976571
date created
2012-01-02 12:10:11
date last changed
2016-12-19 15:37:19
@inproceedings{1976571,
  author       = {Leroy, Wouter and Depla, Diederik},
  booktitle    = {Reactive Sputter Deposition, 10th International symposium, Abstracts},
  language     = {eng},
  location     = {Link{\"o}ping, Sweden},
  title        = {The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering},
  year         = {2011},
}

Chicago
Leroy, Wouter, and Diederik Depla. 2011. “The Energy and Particle Fluxes During the Growth of Multifunctional ZrN Thin Films Deposited by Reactive Magnetron Sputtering.” In Reactive Sputter Deposition, 10th International Symposium, Abstracts.
APA
Leroy, W., & Depla, D. (2011). The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering. Reactive Sputter Deposition, 10th International symposium, Abstracts. Presented at the 10th International symposium on Reactive Sputter Deposition (RDS 2011).
Vancouver
1.
Leroy W, Depla D. The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering. Reactive Sputter Deposition, 10th International symposium, Abstracts. 2011.
MLA
Leroy, Wouter, and Diederik Depla. “The Energy and Particle Fluxes During the Growth of Multifunctional ZrN Thin Films Deposited by Reactive Magnetron Sputtering.” Reactive Sputter Deposition, 10th International Symposium, Abstracts. 2011. Print.