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The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering

Wouter Leroy (UGent) and Diederik Depla (UGent)
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Chicago
Leroy, Wouter, and Diederik Depla. 2011. “The Energy and Particle Fluxes During the Growth of Multifunctional ZrN Thin Films Deposited by Reactive Magnetron Sputtering.” In Reactive Sputter Deposition, 10th International Symposium, Abstracts.
APA
Leroy, W., & Depla, D. (2011). The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering. Reactive Sputter Deposition, 10th International symposium, Abstracts. Presented at the 10th International symposium on Reactive Sputter Deposition (RDS 2011).
Vancouver
1.
Leroy W, Depla D. The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering. Reactive Sputter Deposition, 10th International symposium, Abstracts. 2011.
MLA
Leroy, Wouter, and Diederik Depla. “The Energy and Particle Fluxes During the Growth of Multifunctional ZrN Thin Films Deposited by Reactive Magnetron Sputtering.” Reactive Sputter Deposition, 10th International Symposium, Abstracts. 2011. Print.
@inproceedings{1976571,
  author       = {Leroy, Wouter and Depla, Diederik},
  booktitle    = {Reactive Sputter Deposition, 10th International symposium, Abstracts},
  language     = {eng},
  location     = {Link{\"o}ping, Sweden},
  title        = {The energy and particle fluxes during the growth of multifunctional ZrN thin films deposited by reactive magnetron sputtering},
  year         = {2011},
}