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NEMS-based optical phase modulator fabricated on silicon-on-insulator

Karel Van Acoleyen (UGent) , Joris Roels, Tom Claes (UGent) , Dries Van Thourhout (UGent) and Roel Baets (UGent)
Author
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Project
Center for nano- and biophotonics (NB-Photonics)
Abstract
We present a compact low-power optical phase modulator on Silicon-On-Insulator consisting of an under-etched slot waveguide. By applying a voltage of 15V across a 9mum long slot waveguide an optical phase change of 60deg was observed.
Keywords
electro-optical modulation, nanoelectromechanical devices, silicon-on-insulator

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Citation

Please use this url to cite or link to this publication:

MLA
Van Acoleyen, Karel et al. “NEMS-based Optical Phase Modulator Fabricated on Silicon-on-insulator.” 2011 IEEE 8th International Conference on Group IV Photonics (GFP). Piscataway, NJ, USA: IEEE, 2011. 371–373. Print.
APA
Van Acoleyen, K., Roels, J., Claes, T., Van Thourhout, D., & Baets, R. (2011). NEMS-based optical phase modulator fabricated on silicon-on-insulator. 2011 IEEE 8th International Conference on Group IV Photonics (GFP) (pp. 371–373). Presented at the 8th International conference in Group IV Photonics (GFP 2011), Piscataway, NJ, USA: IEEE.
Chicago author-date
Van Acoleyen, Karel, Joris Roels, Tom Claes, Dries Van Thourhout, and Roel Baets. 2011. “NEMS-based Optical Phase Modulator Fabricated on Silicon-on-insulator.” In 2011 IEEE 8th International Conference on Group IV Photonics (GFP), 371–373. Piscataway, NJ, USA: IEEE.
Chicago author-date (all authors)
Van Acoleyen, Karel, Joris Roels, Tom Claes, Dries Van Thourhout, and Roel Baets. 2011. “NEMS-based Optical Phase Modulator Fabricated on Silicon-on-insulator.” In 2011 IEEE 8th International Conference on Group IV Photonics (GFP), 371–373. Piscataway, NJ, USA: IEEE.
Vancouver
1.
Van Acoleyen K, Roels J, Claes T, Van Thourhout D, Baets R. NEMS-based optical phase modulator fabricated on silicon-on-insulator. 2011 IEEE 8th International Conference on Group IV Photonics (GFP). Piscataway, NJ, USA: IEEE; 2011. p. 371–3.
IEEE
[1]
K. Van Acoleyen, J. Roels, T. Claes, D. Van Thourhout, and R. Baets, “NEMS-based optical phase modulator fabricated on silicon-on-insulator,” in 2011 IEEE 8th International Conference on Group IV Photonics (GFP), London, UK, 2011, pp. 371–373.
@inproceedings{1964326,
  abstract     = {We present a compact low-power optical phase modulator on Silicon-On-Insulator consisting of an under-etched slot waveguide. By applying a voltage of 15V across a 9mum long slot waveguide an optical phase change of 60deg was observed.},
  author       = {Van Acoleyen, Karel and Roels, Joris and Claes, Tom and Van Thourhout, Dries and Baets, Roel},
  booktitle    = {2011 IEEE 8th International Conference on Group IV Photonics (GFP)},
  isbn         = {9781424483396},
  keywords     = {electro-optical modulation,nanoelectromechanical devices,silicon-on-insulator},
  language     = {eng},
  location     = {London, UK},
  pages        = {371--373},
  publisher    = {IEEE},
  title        = {NEMS-based optical phase modulator fabricated on silicon-on-insulator},
  url          = {http://dx.doi.org/10.1109/GROUP4.2011.6053820},
  year         = {2011},
}

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