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Static and dynamic characterization of poly-SiGe grating light valves

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Center for nano- and biophotonics (NB-Photonics)
Abstract
We present the fabrication and the characterization results of poly-SiGe grating light valves showing excellent contrast. We also discuss the different dimensional parameters that affect the switching time of the device through squeeze film damping.
Keywords
Ge-Si alloys, diffraction gratings, light valves, optical fabrication, optical films, optical squeezing, optical switches, semiconductor materials, damping

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Citation

Please use this url to cite or link to this publication:

Chicago
Rudra, Sukumar, Dries Van Thourhout, A Witvrouw, J De Coster, and R Hoof. 2011. “Static and Dynamic Characterization of poly-SiGe Grating Light Valves.” In OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 203–204. Piscataway, NJ, USA: IEEE.
APA
Rudra, S., Van Thourhout, D., Witvrouw, A., De Coster, J., & Hoof, R. (2011). Static and dynamic characterization of poly-SiGe grating light valves. OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (pp. 203–204). Presented at the 16th International conference on Optical MEMS and Nanophotonics (OMN 2011), Piscataway, NJ, USA: IEEE.
Vancouver
1.
Rudra S, Van Thourhout D, Witvrouw A, De Coster J, Hoof R. Static and dynamic characterization of poly-SiGe grating light valves. OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS. Piscataway, NJ, USA: IEEE; 2011. p. 203–4.
MLA
Rudra, Sukumar, Dries Van Thourhout, A Witvrouw, et al. “Static and Dynamic Characterization of poly-SiGe Grating Light Valves.” OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS. Piscataway, NJ, USA: IEEE, 2011. 203–204. Print.
@inproceedings{1961687,
  abstract     = {We present the fabrication and the characterization results of poly-SiGe grating light valves showing excellent contrast. We also discuss the different dimensional parameters that affect the switching time of the device through squeeze film damping.},
  author       = {Rudra, Sukumar and Van Thourhout, Dries and Witvrouw, A and De Coster, J and Hoof, R},
  booktitle    = {OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS},
  isbn         = {9781457703362},
  keyword      = {Ge-Si alloys,diffraction gratings,light valves,optical fabrication,optical films,optical squeezing,optical switches,semiconductor materials,damping},
  language     = {eng},
  location     = {Istanbul, Turkey},
  pages        = {203--204},
  publisher    = {IEEE},
  title        = {Static and dynamic characterization of poly-SiGe grating light valves},
  url          = {http://dx.doi.org/10.1109/OMEMS.2011.6031031},
  year         = {2011},
}

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