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Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique

Nursen Avci, Philippe Smet UGent, Johan Lauwaert UGent, Henk Vrielinck UGent and Dirk Poelman UGent (2011) JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY. 59(2). p.327-333
abstract
Clear aluminium oxide sols without precipitation were synthesized via a non-aqueous sol-gel technique using three different alcohols (ethanol, isopropanol and n-butyl alcohol) as solvent, aluminium sec-butoxide as a precursor and acetyl acetone as a chelating agent. Although all sols could be successfully used to prepare thin films, the most stable one was prepared with n-butyl alcohol. Highly transparent, homogenous and amorphous aluminium oxide thin films were obtained on Si substrates after a heat treatment at 500 A degrees C. X-Ray photoelectron spectroscopy (XPS) and Fourier transform infrared absorption (FT-IR) spectroscopy revealed all films were hydroxide free. The optical and structural properties of the films were particularly investigated. Any significant difference except from thickness on the film properties was not observed by changing the alcohol. Refractive index was used as an indication of the porosity of the films and ranged from 1.54 to 1.60.
Please use this url to cite or link to this publication:
author
organization
year
type
journalArticle (original)
publication status
published
subject
keyword
AL2O3 FILMS, BOEHMITE, DEPOSITION, STABILITY, PHOSPHORS, ACID, INFRARED-SPECTROSCOPY, Thin film, THERMAL EVOLUTION, Optical properties, Non-aqueous sol-gel, Aluminium oxide
journal title
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
J. Sol-Gel Sci. Technol.
volume
59
issue
2
pages
327 - 333
Web of Science type
Article
Web of Science id
000293639400017
JCR category
MATERIALS SCIENCE, CERAMICS
JCR impact factor
1.632 (2011)
JCR rank
4/25 (2011)
JCR quartile
1 (2011)
ISSN
0928-0707
DOI
10.1007/s10971-011-2505-9
project
Center for nano- and biophotonics (NB-Photonics)
language
English
UGent publication?
yes
classification
A1
copyright statement
I have transferred the copyright for this publication to the publisher
id
1932953
handle
http://hdl.handle.net/1854/LU-1932953
date created
2011-10-19 21:51:27
date last changed
2016-12-19 15:41:59
@article{1932953,
  abstract     = {Clear aluminium oxide sols without precipitation were synthesized via a non-aqueous sol-gel technique using three different alcohols (ethanol, isopropanol and n-butyl alcohol) as solvent, aluminium sec-butoxide as a precursor and acetyl acetone as a chelating agent. Although all sols could be successfully used to prepare thin films, the most stable one was prepared with n-butyl alcohol. Highly transparent, homogenous and amorphous aluminium oxide thin films were obtained on Si substrates after a heat treatment at 500 A degrees C. X-Ray photoelectron spectroscopy (XPS) and Fourier transform infrared absorption (FT-IR) spectroscopy revealed all films were hydroxide free. The optical and structural properties of the films were particularly investigated. Any significant difference except from thickness on the film properties was not observed by changing the alcohol. Refractive index was used as an indication of the porosity of the films and ranged from 1.54 to 1.60.},
  author       = {Avci, Nursen and Smet, Philippe and Lauwaert, Johan and Vrielinck, Henk and Poelman, Dirk},
  issn         = {0928-0707},
  journal      = {JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY},
  keyword      = {AL2O3 FILMS,BOEHMITE,DEPOSITION,STABILITY,PHOSPHORS,ACID,INFRARED-SPECTROSCOPY,Thin film,THERMAL EVOLUTION,Optical properties,Non-aqueous sol-gel,Aluminium oxide},
  language     = {eng},
  number       = {2},
  pages        = {327--333},
  title        = {Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique},
  url          = {http://dx.doi.org/10.1007/s10971-011-2505-9},
  volume       = {59},
  year         = {2011},
}

Chicago
Avci, Nursen, Philippe Smet, Johan Lauwaert, Henk Vrielinck, and Dirk Poelman. 2011. “Optical and Structural Properties of Aluminium Oxide Thin Films Prepared by a Non-aqueous Sol-gel Technique.” Journal of Sol-gel Science and Technology 59 (2): 327–333.
APA
Avci, N., Smet, P., Lauwaert, J., Vrielinck, H., & Poelman, D. (2011). Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 59(2), 327–333.
Vancouver
1.
Avci N, Smet P, Lauwaert J, Vrielinck H, Poelman D. Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY. 2011;59(2):327–33.
MLA
Avci, Nursen, Philippe Smet, Johan Lauwaert, et al. “Optical and Structural Properties of Aluminium Oxide Thin Films Prepared by a Non-aqueous Sol-gel Technique.” JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY 59.2 (2011): 327–333. Print.