Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique
- Author
- Nursen Avci (UGent) , Philippe Smet (UGent) , Johan Lauwaert (UGent) , Henk Vrielinck (UGent) and Dirk Poelman (UGent)
- Organization
- Project
- Abstract
- Clear aluminium oxide sols without precipitation were synthesized via a non-aqueous sol-gel technique using three different alcohols (ethanol, isopropanol and n-butyl alcohol) as solvent, aluminium sec-butoxide as a precursor and acetyl acetone as a chelating agent. Although all sols could be successfully used to prepare thin films, the most stable one was prepared with n-butyl alcohol. Highly transparent, homogenous and amorphous aluminium oxide thin films were obtained on Si substrates after a heat treatment at 500 A degrees C. X-Ray photoelectron spectroscopy (XPS) and Fourier transform infrared absorption (FT-IR) spectroscopy revealed all films were hydroxide free. The optical and structural properties of the films were particularly investigated. Any significant difference except from thickness on the film properties was not observed by changing the alcohol. Refractive index was used as an indication of the porosity of the films and ranged from 1.54 to 1.60.
- Keywords
- AL2O3 FILMS, BOEHMITE, DEPOSITION, STABILITY, PHOSPHORS, ACID, INFRARED-SPECTROSCOPY, Thin film, THERMAL EVOLUTION, Optical properties, Non-aqueous sol-gel, Aluminium oxide
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Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-1932953
- MLA
- Avci, Nursen, et al. “Optical and Structural Properties of Aluminium Oxide Thin Films Prepared by a Non-Aqueous Sol-Gel Technique.” JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, vol. 59, no. 2, 2011, pp. 327–33, doi:10.1007/s10971-011-2505-9.
- APA
- Avci, N., Smet, P., Lauwaert, J., Vrielinck, H., & Poelman, D. (2011). Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 59(2), 327–333. https://doi.org/10.1007/s10971-011-2505-9
- Chicago author-date
- Avci, Nursen, Philippe Smet, Johan Lauwaert, Henk Vrielinck, and Dirk Poelman. 2011. “Optical and Structural Properties of Aluminium Oxide Thin Films Prepared by a Non-Aqueous Sol-Gel Technique.” JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY 59 (2): 327–33. https://doi.org/10.1007/s10971-011-2505-9.
- Chicago author-date (all authors)
- Avci, Nursen, Philippe Smet, Johan Lauwaert, Henk Vrielinck, and Dirk Poelman. 2011. “Optical and Structural Properties of Aluminium Oxide Thin Films Prepared by a Non-Aqueous Sol-Gel Technique.” JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY 59 (2): 327–333. doi:10.1007/s10971-011-2505-9.
- Vancouver
- 1.Avci N, Smet P, Lauwaert J, Vrielinck H, Poelman D. Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY. 2011;59(2):327–33.
- IEEE
- [1]N. Avci, P. Smet, J. Lauwaert, H. Vrielinck, and D. Poelman, “Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique,” JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, vol. 59, no. 2, pp. 327–333, 2011.
@article{1932953,
abstract = {{Clear aluminium oxide sols without precipitation were synthesized via a non-aqueous sol-gel technique using three different alcohols (ethanol, isopropanol and n-butyl alcohol) as solvent, aluminium sec-butoxide as a precursor and acetyl acetone as a chelating agent. Although all sols could be successfully used to prepare thin films, the most stable one was prepared with n-butyl alcohol. Highly transparent, homogenous and amorphous aluminium oxide thin films were obtained on Si substrates after a heat treatment at 500 A degrees C. X-Ray photoelectron spectroscopy (XPS) and Fourier transform infrared absorption (FT-IR) spectroscopy revealed all films were hydroxide free. The optical and structural properties of the films were particularly investigated. Any significant difference except from thickness on the film properties was not observed by changing the alcohol. Refractive index was used as an indication of the porosity of the films and ranged from 1.54 to 1.60.}},
author = {{Avci, Nursen and Smet, Philippe and Lauwaert, Johan and Vrielinck, Henk and Poelman, Dirk}},
issn = {{0928-0707}},
journal = {{JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY}},
keywords = {{AL2O3 FILMS,BOEHMITE,DEPOSITION,STABILITY,PHOSPHORS,ACID,INFRARED-SPECTROSCOPY,Thin film,THERMAL EVOLUTION,Optical properties,Non-aqueous sol-gel,Aluminium oxide}},
language = {{eng}},
number = {{2}},
pages = {{327--333}},
title = {{Optical and structural properties of aluminium oxide thin films prepared by a non-aqueous sol-gel technique}},
url = {{http://doi.org/10.1007/s10971-011-2505-9}},
volume = {{59}},
year = {{2011}},
}
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