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An electret-based electrostatic µ-generator

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Abstract
This paper proposes a new approach towards mechanical waste energy scavenging, using a micromachined electrostatic converter. The device consists of a vibration sensitive variable capacitor polarized by an electret. The variation of the capacitance results in a current through a load circuit. A physical model of the device is described; in order to obtain a closed form expression for the converted power a linear model is presented. This model shows that 50 muW can be generated with a 5 gm vibration. A first prototype design based on a SOI MPW-service is proposed.

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Chicago
Sterken, Tom, P Fiorini, K Baert, R Puers, and G Borghs. 2003. “An Electret-based Electrostatic Μ-generator.” In Boston Transducers  ’03 : Digest of Technical Papers, Vols 1 and 2, 1291–1294. New York, NY, USA: IEEE.
APA
Sterken, T., Fiorini, P., Baert, K., Puers, R., & Borghs, G. (2003). An electret-based electrostatic µ-generator. Boston Transducers  ’03 : digest of technical papers, vols 1 and 2 (pp. 1291–1294). Presented at the 12th International conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2003), New York, NY, USA: IEEE.
Vancouver
1.
Sterken T, Fiorini P, Baert K, Puers R, Borghs G. An electret-based electrostatic µ-generator. Boston Transducers  ’03 : digest of technical papers, vols 1 and 2. New York, NY, USA: IEEE; 2003. p. 1291–4.
MLA
Sterken, Tom, P Fiorini, K Baert, et al. “An Electret-based Electrostatic Μ-generator.” Boston Transducers  ’03 : Digest of Technical Papers, Vols 1 and 2. New York, NY, USA: IEEE, 2003. 1291–1294. Print.
@inproceedings{1847614,
  abstract     = {This paper proposes a new approach towards mechanical waste energy scavenging, using a micromachined electrostatic converter. The device consists of a vibration sensitive variable capacitor polarized by an electret. The variation of the capacitance results in a current through a load circuit. A physical model of the device is described; in order to obtain a closed form expression for the converted power a linear model is presented. This model shows that 50 muW can be generated with a 5 gm vibration. A first prototype design based on a SOI MPW-service is proposed.},
  author       = {Sterken, Tom and Fiorini, P and Baert, K and Puers, R and Borghs, G},
  booktitle    = {Boston Transducers '03 : digest of technical papers, vols 1 and 2},
  isbn         = {9780780377318},
  language     = {eng},
  location     = {Boston, MA, USA},
  pages        = {1291--1294},
  publisher    = {IEEE},
  title        = {An electret-based electrostatic {\textmu}-generator},
  url          = {http://dx.doi.org/10.1109/SENSOR.2003.1217009},
  year         = {2003},
}

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