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A new power MEMS component with variable capacitance

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Abstract
Autonomous devices such as wireless sensors and sensor networks need a long battery lifetime in a small volume. Incorporating micro-power generators based on ambient energy increases the lifetime of these systems while reducing the volume. This paper describes a new approach to the conversion of mechanical energy, available in vibrations, to electrical energy. The conversion principle is based on charge transportation between two parallel capacitors. An electret is used to polarize the device. A large-signal model was developed, allowing simulations of the behavior of the generator. A small-signal model was then derived in order to quantify the output power as a function of the design parameters. These models show the possibility of generating up to 40 muW with a device of 10 mm 2. A layout was made based on a standard SOI-technology, available in an MPW. With this design a power of 1 muW at 1020 Hz is expected.
Keywords
SOI, modeling, micro-generator, electret

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Citation

Please use this url to cite or link to this publication:

Chicago
Sterken, Tom, K Baert, R Puers, G Borghs, and R Mertens. 2003. “A New Power MEMS Component with Variable Capacitance.” In 2003 Proceedings : Pan Pacific Microelectronics Symposium, ed. Shen-Li Fu, 27–34. Edina, MN, USA: Surface Mount Technology Association.
APA
Sterken, T., Baert, K., Puers, R., Borghs, G., & Mertens, R. (2003). A new power MEMS component with variable capacitance. In S.-L. Fu (Ed.), 2003 Proceedings : Pan Pacific Microelectronics symposium (pp. 27–34). Presented at the Mircoelectronics Symposium and Exhibition, Edina, MN, USA: Surface Mount Technology Association.
Vancouver
1.
Sterken T, Baert K, Puers R, Borghs G, Mertens R. A new power MEMS component with variable capacitance. In: Fu S-L, editor. 2003 Proceedings : Pan Pacific Microelectronics symposium. Edina, MN, USA: Surface Mount Technology Association; 2003. p. 27–34.
MLA
Sterken, Tom, K Baert, R Puers, et al. “A New Power MEMS Component with Variable Capacitance.” 2003 Proceedings : Pan Pacific Microelectronics Symposium. Ed. Shen-Li Fu. Edina, MN, USA: Surface Mount Technology Association, 2003. 27–34. Print.
@inproceedings{1847602,
  abstract     = {Autonomous devices such as wireless sensors and sensor networks need a long battery lifetime in a small volume. Incorporating micro-power generators based on ambient energy increases the lifetime of these systems while reducing the volume. This paper describes a new approach to the conversion of mechanical energy, available in vibrations, to electrical energy. The conversion principle is based on charge transportation between two parallel capacitors. An electret is used to polarize the device. A large-signal model was developed, allowing simulations of the behavior of the generator. A small-signal model was then derived in order to quantify the output power as a function of the design parameters. These models show the possibility of generating up to 40 muW with a device of 10 mm 2. A layout was made based on a standard SOI-technology, available in an MPW. With this design a power of 1 muW at 1020 Hz is expected.},
  articleno    = {B2003-10-1210-024},
  author       = {Sterken, Tom and Baert, K and Puers, R and Borghs, G and Mertens, R},
  booktitle    = {2003 Proceedings : Pan Pacific Microelectronics symposium},
  editor       = {Fu, Shen-Li},
  isbn         = {9780972451116},
  keyword      = {SOI,modeling,micro-generator,electret},
  language     = {eng},
  location     = {Kohala, HI, USA},
  pages        = {B2003-10-1210-024:27--B2003-10-1210-024:34},
  publisher    = {Surface Mount Technology Association},
  title        = {A new power MEMS component with variable capacitance},
  year         = {2003},
}

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