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A new power MEMS component with variable capacitance

Tom Sterken UGent, K Baert, R Puers, G Borghs and R Mertens (2003) 2003 Proceedings : Pan Pacific Microelectronics symposium. p.27-34
abstract
Autonomous devices such as wireless sensors and sensor networks need a long battery lifetime in a small volume. Incorporating micro-power generators based on ambient energy increases the lifetime of these systems while reducing the volume. This paper describes a new approach to the conversion of mechanical energy, available in vibrations, to electrical energy. The conversion principle is based on charge transportation between two parallel capacitors. An electret is used to polarize the device. A large-signal model was developed, allowing simulations of the behavior of the generator. A small-signal model was then derived in order to quantify the output power as a function of the design parameters. These models show the possibility of generating up to 40 muW with a device of 10 mm 2. A layout was made based on a standard SOI-technology, available in an MPW. With this design a power of 1 muW at 1020 Hz is expected.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (conferencePaper)
publication status
published
subject
keyword
SOI, modeling, micro-generator, electret
in
2003 Proceedings : Pan Pacific Microelectronics symposium
editor
Shen-Li Fu
article number
B2003-10-1210-024
pages
27 - 34
publisher
Surface Mount Technology Association
place of publication
Edina, MN, USA
conference name
Mircoelectronics Symposium and Exhibition
conference location
Kohala, HI, USA
conference start
2003-02-18
conference end
2003-02-20
Web of Science type
Conference Paper
Web of Science id
7726245
ISBN
9780972451116
language
English
UGent publication?
no
classification
C1
copyright statement
I have transferred the copyright for this publication to the publisher
id
1847602
handle
http://hdl.handle.net/1854/LU-1847602
date created
2011-06-29 17:05:01
date last changed
2017-01-02 09:53:20
@inproceedings{1847602,
  abstract     = {Autonomous devices such as wireless sensors and sensor networks need a long battery lifetime in a small volume. Incorporating micro-power generators based on ambient energy increases the lifetime of these systems while reducing the volume. This paper describes a new approach to the conversion of mechanical energy, available in vibrations, to electrical energy. The conversion principle is based on charge transportation between two parallel capacitors. An electret is used to polarize the device. A large-signal model was developed, allowing simulations of the behavior of the generator. A small-signal model was then derived in order to quantify the output power as a function of the design parameters. These models show the possibility of generating up to 40 muW with a device of 10 mm 2. A layout was made based on a standard SOI-technology, available in an MPW. With this design a power of 1 muW at 1020 Hz is expected.},
  articleno    = {B2003-10-1210-024},
  author       = {Sterken, Tom and Baert, K and Puers, R and Borghs, G and Mertens, R},
  booktitle    = {2003 Proceedings : Pan Pacific Microelectronics symposium},
  editor       = {Fu, Shen-Li},
  isbn         = {9780972451116},
  keyword      = {SOI,modeling,micro-generator,electret},
  language     = {eng},
  location     = {Kohala, HI, USA},
  pages        = {B2003-10-1210-024:27--B2003-10-1210-024:34},
  publisher    = {Surface Mount Technology Association},
  title        = {A new power MEMS component with variable capacitance},
  year         = {2003},
}

Chicago
Sterken, Tom, K Baert, R Puers, G Borghs, and R Mertens. 2003. “A New Power MEMS Component with Variable Capacitance.” In 2003 Proceedings : Pan Pacific Microelectronics Symposium, ed. Shen-Li Fu, 27–34. Edina, MN, USA: Surface Mount Technology Association.
APA
Sterken, T., Baert, K., Puers, R., Borghs, G., & Mertens, R. (2003). A new power MEMS component with variable capacitance. In S.-L. Fu (Ed.), 2003 Proceedings : Pan Pacific Microelectronics symposium (pp. 27–34). Presented at the Mircoelectronics Symposium and Exhibition, Edina, MN, USA: Surface Mount Technology Association.
Vancouver
1.
Sterken T, Baert K, Puers R, Borghs G, Mertens R. A new power MEMS component with variable capacitance. In: Fu S-L, editor. 2003 Proceedings : Pan Pacific Microelectronics symposium. Edina, MN, USA: Surface Mount Technology Association; 2003. p. 27–34.
MLA
Sterken, Tom, K Baert, R Puers, et al. “A New Power MEMS Component with Variable Capacitance.” 2003 Proceedings : Pan Pacific Microelectronics Symposium. Ed. Shen-Li Fu. Edina, MN, USA: Surface Mount Technology Association, 2003. 27–34. Print.