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Piezoelectric harvesters and MEMS technology : fabrication, modeling and measurements

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Abstract
Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 mu W has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.
Keywords
energy harvester, piezoelectricity, micromachining

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Chicago
Renaud, M, Tom Sterken, A Schmitz, P Fiorini, C Van Hoof, and R Puers. 2007. “Piezoelectric Harvesters and MEMS Technology : Fabrication, Modeling and Measurements.” In Transducers  ’07 and Eurosensors XXI : Digest of Technical Papers, Vols 1 and 2, U450–U451. New York, NY, USA: IEEE.
APA
Renaud, M, Sterken, T., Schmitz, A., Fiorini, P., Van Hoof, C., & Puers, R. (2007). Piezoelectric harvesters and MEMS technology : fabrication, modeling and measurements. Transducers  ’07 and Eurosensors XXI : digest of technical papers, vols 1 and 2 (pp. U450–U451). Presented at the 14th International conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2007), New York, NY, USA: IEEE.
Vancouver
1.
Renaud M, Sterken T, Schmitz A, Fiorini P, Van Hoof C, Puers R. Piezoelectric harvesters and MEMS technology : fabrication, modeling and measurements. Transducers  ’07 and Eurosensors XXI : digest of technical papers, vols 1 and 2. New York, NY, USA: IEEE; 2007. p. U450–U451.
MLA
Renaud, M, Tom Sterken, A Schmitz, et al. “Piezoelectric Harvesters and MEMS Technology : Fabrication, Modeling and Measurements.” Transducers  ’07 and Eurosensors XXI : Digest of Technical Papers, Vols 1 and 2. New York, NY, USA: IEEE, 2007. U450–U451. Print.
@inproceedings{1847544,
  abstract     = {Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 mu W has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.},
  author       = {Renaud, M and Sterken, Tom and Schmitz, A and Fiorini, P and Van Hoof, C and Puers, R},
  booktitle    = {Transducers '07 and Eurosensors XXI : digest of technical papers, vols 1 and 2},
  isbn         = {9781424408412},
  keyword      = {energy harvester,piezoelectricity,micromachining},
  language     = {eng},
  location     = {Lyon, France},
  pages        = {U450--U451},
  publisher    = {IEEE},
  title        = {Piezoelectric harvesters and MEMS technology : fabrication, modeling and measurements},
  url          = {http://dx.doi.org/10.1109/SENSOR.2007.4300274},
  year         = {2007},
}

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