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Piezoelectric harvesters and MEMS technology: fabrication, modeling and measurements

M Renaud, Tom Sterken UGent, A Schmitz, P Fiorini, C Van Hoof and R Puers (2007) Transducers '07 and Eurosensors XXI : digest of technical papers, vols 1 and 2. p.U450-U451
abstract
Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 mu W has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.
Please use this url to cite or link to this publication:
author
organization
year
type
conference (proceedingsPaper)
publication status
published
subject
keyword
energy harvester, piezoelectricity, micromachining
in
Transducers '07 and Eurosensors XXI : digest of technical papers, vols 1 and 2
pages
U450 - U451
publisher
IEEE
place of publication
New York, NY, USA
conference name
14th International conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2007)
conference location
Lyon, France
conference start
2007-06-10
conference end
2007-06-14
Web of Science type
Proceedings Paper
Web of Science id
000249603700218
ISBN
9781424408412
9781424408429
DOI
10.1109/SENSOR.2007.4300274
language
English
UGent publication?
no
classification
P1
additional info
alternative pagination on IEEE Xplore: 891-894
id
1847544
handle
http://hdl.handle.net/1854/LU-1847544
date created
2011-06-29 17:05:01
date last changed
2017-01-02 09:52:44
@inproceedings{1847544,
  abstract     = {Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 mu W has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.},
  author       = {Renaud, M and Sterken, Tom and Schmitz, A and Fiorini, P and Van Hoof, C and Puers, R},
  booktitle    = {Transducers '07 and Eurosensors XXI : digest of technical papers, vols 1 and 2},
  isbn         = {9781424408412},
  keyword      = {energy harvester,piezoelectricity,micromachining},
  language     = {eng},
  location     = {Lyon, France},
  pages        = {U450--U451},
  publisher    = {IEEE},
  title        = {Piezoelectric harvesters and MEMS technology: fabrication, modeling and measurements},
  url          = {http://dx.doi.org/10.1109/SENSOR.2007.4300274},
  year         = {2007},
}

Chicago
Renaud, M, Tom Sterken, A Schmitz, P Fiorini, C Van Hoof, and R Puers. 2007. “Piezoelectric Harvesters and MEMS Technology: Fabrication, Modeling and Measurements.” In Transducers  ’07 and Eurosensors XXI : Digest of Technical Papers, Vols 1 and 2, U450–U451. New York, NY, USA: IEEE.
APA
Renaud, M, Sterken, T., Schmitz, A., Fiorini, P., Van Hoof, C., & Puers, R. (2007). Piezoelectric harvesters and MEMS technology: fabrication, modeling and measurements. Transducers  ’07 and Eurosensors XXI : digest of technical papers, vols 1 and 2 (pp. U450–U451). Presented at the 14th International conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2007), New York, NY, USA: IEEE.
Vancouver
1.
Renaud M, Sterken T, Schmitz A, Fiorini P, Van Hoof C, Puers R. Piezoelectric harvesters and MEMS technology: fabrication, modeling and measurements. Transducers  ’07 and Eurosensors XXI : digest of technical papers, vols 1 and 2. New York, NY, USA: IEEE; 2007. p. U450–U451.
MLA
Renaud, M, Tom Sterken, A Schmitz, et al. “Piezoelectric Harvesters and MEMS Technology: Fabrication, Modeling and Measurements.” Transducers  ’07 and Eurosensors XXI : Digest of Technical Papers, Vols 1 and 2. New York, NY, USA: IEEE, 2007. U450–U451. Print.