Advanced search

Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings.

(1998) THIN SOLID FILMS. 317(1-2). p.405-408
Author
Organization

Citation

Please use this url to cite or link to this publication:

Chicago
LIPPENS, P, A SEGERS, Johan Haemers, and Roger De Gryse. 1998. “Chemical Instability of the Target Surface During DC-magnetron Sputtering of ITO-coatings.” Thin Solid Films 317 (1-2): 405–408.
APA
LIPPENS, P., SEGERS, A., Haemers, J., & De Gryse, R. (1998). Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings. THIN SOLID FILMS, 317(1-2), 405–408.
Vancouver
1.
LIPPENS P, SEGERS A, Haemers J, De Gryse R. Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings. THIN SOLID FILMS. 1998;317(1-2):405–8.
MLA
LIPPENS, P, A SEGERS, Johan Haemers, et al. “Chemical Instability of the Target Surface During DC-magnetron Sputtering of ITO-coatings.” THIN SOLID FILMS 317.1-2 (1998): 405–408. Print.
@article{178945,
  author       = {LIPPENS, P and SEGERS, A and Haemers, Johan and De Gryse, Roger},
  issn         = {0040-6090},
  journal      = {THIN SOLID FILMS},
  language     = {eng},
  number       = {1-2},
  pages        = {405--408},
  title        = {Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings.},
  volume       = {317},
  year         = {1998},
}

Web of Science
Times cited: