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Probing nitride thin films in 3-dimensions using a variable energy electron beam

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Organization
Abstract
The efficacy of electron beam analysis techniques to the investigation of both the structural and optical properties of nitride thin films in 3-dimensions is illustrated by the presentation of (i) CL spectroscopy of InGaN and AlGaN epilayers; (ii) CL imaging of an InGaN/GaN multiple quantum well (MQW) grown on an epitaxially lateral overgrown GaN (ELOG) layer; (iii) EBSD from a GaN epilayer.
Keywords
InGaN

Citation

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Chicago
Trager-Cowan, C, JF Treguer, STF Grimson, I Osborne, M Barisonzi, PG Middleton, SK Manson-Smith, et al. 1999. “Probing Nitride Thin Films in 3-dimensions Using a Variable Energy Electron Beam.” Ed. CJ Kiely. Institute of Physics Conference Series 161: 91–94.
APA
Trager-Cowan, C., Treguer, J., Grimson, S., Osborne, I., Barisonzi, M., Middleton, P., Manson-Smith, S., et al. (1999). Probing nitride thin films in 3-dimensions using a variable energy electron beam. (C. Kiely, Ed.)Institute of Physics Conference Series, 161, 91–94. Presented at the Biennial meeting of the Electron Microscopy and Analysis Group of the Institute of Physics (EMAG 99).
Vancouver
1.
Trager-Cowan C, Treguer J, Grimson S, Osborne I, Barisonzi M, Middleton P, et al. Probing nitride thin films in 3-dimensions using a variable energy electron beam. Kiely C, editor. Institute of Physics Conference Series. 1999;161:91–4.
MLA
Trager-Cowan, C, JF Treguer, STF Grimson, et al. “Probing Nitride Thin Films in 3-dimensions Using a Variable Energy Electron Beam.” Ed. CJ Kiely. Institute of Physics Conference Series 161 (1999): 91–94. Print.
@article{172245,
  abstract     = {The efficacy of electron beam analysis techniques to the investigation of both the structural and optical properties of nitride thin films in 3-dimensions is illustrated by the presentation of (i) CL spectroscopy of InGaN and AlGaN epilayers; (ii) CL imaging of an InGaN/GaN multiple quantum well (MQW) grown on an epitaxially lateral overgrown GaN (ELOG) layer; (iii) EBSD from a GaN epilayer.},
  author       = {Trager-Cowan, C and Treguer, JF and Grimson, STF and Osborne, I and Barisonzi, M and Middleton, PG and Manson-Smith, SK and Mohammed, A and O'Donnell, KP and Van der Stricht, Wim and Jacobs, K and Moerman, Ingrid and Demeester, Piet and Wu, MF and Vantomme, A},
  editor       = {Kiely, CJ},
  isbn         = {9780750305778},
  issn         = {0951-3248},
  journal      = {Institute of Physics Conference Series},
  language     = {eng},
  location     = {Sheffield, UK},
  pages        = {91--94},
  title        = {Probing nitride thin films in 3-dimensions using a variable energy electron beam},
  volume       = {161},
  year         = {1999},
}

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