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Electrical characterization of Ar-ion-bombardment-induced damage in Au/Si and PtSi/Si Schottky barrier contacts.

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Chicago
ZHU, SY, Christophe Detavernier, Roland Vanmeirhaeghe, Felix Cardon, Anja Blondeel, Paul Clauws, GP RU, and BZ LI. 2001. “Electrical Characterization of Ar-ion-bombardment-induced Damage in Au/Si and PtSi/Si Schottky Barrier Contacts.” Semiconductor Science and Technology 16 (2): 83–90.
APA
ZHU, SY, Detavernier, C., Vanmeirhaeghe, R., Cardon, F., Blondeel, A., Clauws, P., RU, G., et al. (2001). Electrical characterization of Ar-ion-bombardment-induced damage in Au/Si and PtSi/Si Schottky barrier contacts. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 16(2), 83–90.
Vancouver
1.
ZHU S, Detavernier C, Vanmeirhaeghe R, Cardon F, Blondeel A, Clauws P, et al. Electrical characterization of Ar-ion-bombardment-induced damage in Au/Si and PtSi/Si Schottky barrier contacts. SEMICONDUCTOR SCIENCE AND TECHNOLOGY. 2001;16(2):83–90.
MLA
ZHU, SY, Christophe Detavernier, Roland Vanmeirhaeghe, et al. “Electrical Characterization of Ar-ion-bombardment-induced Damage in Au/Si and PtSi/Si Schottky Barrier Contacts.” SEMICONDUCTOR SCIENCE AND TECHNOLOGY 16.2 (2001): 83–90. Print.
@article{168079,
  author       = {ZHU, SY and Detavernier, Christophe and Vanmeirhaeghe, Roland and Cardon, Felix and Blondeel, Anja and Clauws, Paul and RU, GP and LI, BZ},
  issn         = {0268-1242},
  journal      = {SEMICONDUCTOR SCIENCE AND TECHNOLOGY},
  language     = {eng},
  number       = {2},
  pages        = {83--90},
  title        = {Electrical characterization of Ar-ion-bombardment-induced damage in Au/Si and PtSi/Si Schottky barrier contacts.},
  volume       = {16},
  year         = {2001},
}

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