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Chicago
QU, XP, Christophe Detavernier, Roland Vanmeirhaeghe, and Felix Cardon. 2002. “Sillicide Formation for Ni and Pd Bilayers on Si(100) Substrates.” In MRS Proc. 670 (Spring Meeting San Francisco 2001), Materials Research Society, Pittsburgh, PA, USA, 2002, K 6.10.1-6.10.6.
APA
QU, X., Detavernier, C., Vanmeirhaeghe, R., & Cardon, F. (2002). Sillicide formation for Ni and Pd bilayers on Si(100) substrates. MRS Proc. 670 (Spring Meeting San Francisco 2001), Materials Research Society, Pittsburgh, PA, USA, 2002, K 6.10.1-6.10.6.
Vancouver
1.
QU X, Detavernier C, Vanmeirhaeghe R, Cardon F. Sillicide formation for Ni and Pd bilayers on Si(100) substrates. MRS Proc. 670 (Spring Meeting San Francisco 2001), Materials Research Society, Pittsburgh, PA, USA, 2002, K 6.10.1-6.10.6. 2002.
MLA
QU, XP, Christophe Detavernier, Roland Vanmeirhaeghe, et al. “Sillicide Formation for Ni and Pd Bilayers on Si(100) Substrates.” MRS Proc. 670 (Spring Meeting San Francisco 2001), Materials Research Society, Pittsburgh, PA, USA, 2002, K 6.10.1-6.10.6. 2002. Print.
@inproceedings{162205,
  author       = {QU, XP and Detavernier, Christophe and Vanmeirhaeghe, Roland and Cardon, Felix},
  booktitle    = {MRS Proc. 670 (Spring Meeting San Francisco 2001), Materials Research Society, Pittsburgh, PA, USA, 2002, K 6.10.1-6.10.6},
  language     = {eng},
  title        = {Sillicide formation for Ni and Pd bilayers on Si(100) substrates},
  year         = {2002},
}