
Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon.
- Author
- E SIMOEN, C CLAEYS, R JOB, AG ULYASHIN, WR FAHRNER, Olivier De Gryse and Paul Clauws (UGent)
- Organization
Citation
Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-162182
- MLA
- SIMOEN, E, C CLAEYS, R JOB, et al. “Hydrogen Plasma-enhanced Thermal Donor Formation in N-type Oxygen-doped High-resistivity Float-zone Silicon.” APPLIED PHYSICS LETTERS 81.10 (2002): 1842–1844. Print.
- APA
- SIMOEN, E., CLAEYS, C., JOB, R., ULYASHIN, A., FAHRNER, W., De Gryse, O., & Clauws, P. (2002). Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon. APPLIED PHYSICS LETTERS, 81(10), 1842–1844.
- Chicago author-date
- SIMOEN, E, C CLAEYS, R JOB, AG ULYASHIN, WR FAHRNER, Olivier De Gryse, and Paul Clauws. 2002. “Hydrogen Plasma-enhanced Thermal Donor Formation in N-type Oxygen-doped High-resistivity Float-zone Silicon.” Applied Physics Letters 81 (10): 1842–1844.
- Chicago author-date (all authors)
- SIMOEN, E, C CLAEYS, R JOB, AG ULYASHIN, WR FAHRNER, Olivier De Gryse, and Paul Clauws. 2002. “Hydrogen Plasma-enhanced Thermal Donor Formation in N-type Oxygen-doped High-resistivity Float-zone Silicon.” Applied Physics Letters 81 (10): 1842–1844.
- Vancouver
- 1.SIMOEN E, CLAEYS C, JOB R, ULYASHIN A, FAHRNER W, De Gryse O, et al. Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon. APPLIED PHYSICS LETTERS. 2002;81(10):1842–4.
- IEEE
- [1]E. SIMOEN et al., “Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon.,” APPLIED PHYSICS LETTERS, vol. 81, no. 10, pp. 1842–1844, 2002.
@article{162182, author = {SIMOEN, E and CLAEYS, C and JOB, R and ULYASHIN, AG and FAHRNER, WR and De Gryse, Olivier and Clauws, Paul}, issn = {0003-6951}, journal = {APPLIED PHYSICS LETTERS}, language = {eng}, number = {10}, pages = {1842--1844}, title = {Hydrogen plasma-enhanced thermal donor formation in n-type oxygen-doped high-resistivity float-zone silicon.}, volume = {81}, year = {2002}, }