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Low pressure Behaviour of the sputter magnetron discharge

Guy Buyle, Diederik Depla (UGent) , W DE BOSSCHER, Karin Eufinger (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent)
(2002) 2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p. 218. -.
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MLA
Buyle, Guy, et al. “Low Pressure Behaviour of the Sputter Magnetron Discharge.” 2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p. 218. -, 2002.
APA
Buyle, G., Depla, D., DE BOSSCHER, W., Eufinger, K., Haemers, J., & De Gryse, R. (2002). Low pressure Behaviour of the sputter magnetron discharge. 2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p. 218. -.
Chicago author-date
Buyle, Guy, Diederik Depla, W DE BOSSCHER, Karin Eufinger, Johan Haemers, and Roger De Gryse. 2002. “Low Pressure Behaviour of the Sputter Magnetron Discharge.” In 2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p. 218. -.
Chicago author-date (all authors)
Buyle, Guy, Diederik Depla, W DE BOSSCHER, Karin Eufinger, Johan Haemers, and Roger De Gryse. 2002. “Low Pressure Behaviour of the Sputter Magnetron Discharge.” In 2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p. 218. -.
Vancouver
1.
Buyle G, Depla D, DE BOSSCHER W, Eufinger K, Haemers J, De Gryse R. Low pressure Behaviour of the sputter magnetron discharge. In: 2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p 218 -. 2002.
IEEE
[1]
G. Buyle, D. Depla, W. DE BOSSCHER, K. Eufinger, J. Haemers, and R. De Gryse, “Low pressure Behaviour of the sputter magnetron discharge,” in 2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p. 218. -, 2002.
@inproceedings{162162,
  author       = {{Buyle, Guy and Depla, Diederik and DE BOSSCHER, W and Eufinger, Karin and Haemers, Johan and De Gryse, Roger}},
  booktitle    = {{2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p. 218. -}},
  isbn         = {{078037407X}},
  language     = {{eng}},
  title        = {{Low pressure Behaviour of the sputter magnetron discharge}},
  year         = {{2002}},
}