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Influence of recapture of secondary electrons on the magnetron sputtering deposition process.

Guy Buyle, Diederik Depla UGent, Karin Eufinger UGent, Johan Haemers UGent and Roger De Gryse UGent (2002) 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002.. p.348-353
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author
organization
year
type
conference
publication status
published
subject
in
45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002.
pages
348-353 pages
language
English
UGent publication?
yes
classification
C1
id
162159
handle
http://hdl.handle.net/1854/LU-162159
date created
2004-01-14 13:39:00
date last changed
2016-12-19 15:36:18
@inproceedings{162159,
  author       = {Buyle, Guy and Depla, Diederik and Eufinger, Karin and Haemers, Johan and De Gryse, Roger},
  booktitle    = {45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002.},
  language     = {eng},
  pages        = {348--353},
  title        = {Influence of recapture of secondary electrons on the magnetron sputtering deposition process.},
  year         = {2002},
}

Chicago
Buyle, Guy, Diederik Depla, Karin Eufinger, Johan Haemers, and Roger De Gryse. 2002. “Influence of Recapture of Secondary Electrons on the Magnetron Sputtering Deposition Process.” In 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002., 348–353.
APA
Buyle, G., Depla, D., Eufinger, K., Haemers, J., & De Gryse, R. (2002). Influence of recapture of secondary electrons on the magnetron sputtering deposition process. 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002. (pp. 348–353).
Vancouver
1.
Buyle G, Depla D, Eufinger K, Haemers J, De Gryse R. Influence of recapture of secondary electrons on the magnetron sputtering deposition process. 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002. 2002. p. 348–53.
MLA
Buyle, Guy, Diederik Depla, Karin Eufinger, et al. “Influence of Recapture of Secondary Electrons on the Magnetron Sputtering Deposition Process.” 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002. 2002. 348–353. Print.