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Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds.

Anneke Segers, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent)
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Citation

Please use this url to cite or link to this publication:

MLA
Segers, Anneke, et al. “Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds.” 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002., 2002, pp. 30–35.
APA
Segers, A., Depla, D., Eufinger, K., Haemers, J., & De Gryse, R. (2002). Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds. In 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002. (pp. 30–35).
Chicago author-date
Segers, Anneke, Diederik Depla, Karin Eufinger, Johan Haemers, and Roger De Gryse. 2002. “Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds.” In 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002., 30–35.
Chicago author-date (all authors)
Segers, Anneke, Diederik Depla, Karin Eufinger, Johan Haemers, and Roger De Gryse. 2002. “Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds.” In 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002., 30–35.
Vancouver
1.
Segers A, Depla D, Eufinger K, Haemers J, De Gryse R. Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds. In: 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002. 2002. p. 30–5.
IEEE
[1]
A. Segers, D. Depla, K. Eufinger, J. Haemers, and R. De Gryse, “Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds.,” in 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002., 2002, pp. 30–35.
@inproceedings{162156,
  author       = {{Segers, Anneke and Depla, Diederik and Eufinger, Karin and Haemers, Johan and De Gryse, Roger}},
  booktitle    = {{45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002.}},
  language     = {{eng}},
  pages        = {{30--35}},
  title        = {{Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds.}},
  year         = {{2002}},
}