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Atomic layer deposition of ZnS thin films based on diethyl zinc and hydrogen sulfide.

(2002) JOURNAL OF CRYSTAL GROWTH. 234(4). p.690-698
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Chicago
Stuyven, Gert, Patrick De Visschere, Andriy Hikavyy, and Kristiaan Neyts. 2002. “Atomic Layer Deposition of ZnS Thin Films Based on Diethyl Zinc and Hydrogen Sulfide.” Journal of Crystal Growth 234 (4): 690–698.
APA
Stuyven, G., De Visschere, P., Hikavyy, A., & Neyts, K. (2002). Atomic layer deposition of ZnS thin films based on diethyl zinc and hydrogen sulfide. JOURNAL OF CRYSTAL GROWTH, 234(4), 690–698.
Vancouver
1.
Stuyven G, De Visschere P, Hikavyy A, Neyts K. Atomic layer deposition of ZnS thin films based on diethyl zinc and hydrogen sulfide. JOURNAL OF CRYSTAL GROWTH. 2002;234(4):690–8.
MLA
Stuyven, Gert, Patrick De Visschere, Andriy Hikavyy, et al. “Atomic Layer Deposition of ZnS Thin Films Based on Diethyl Zinc and Hydrogen Sulfide.” JOURNAL OF CRYSTAL GROWTH 234.4 (2002): 690–698. Print.
@article{160462,
  author       = {Stuyven, Gert and De Visschere, Patrick and Hikavyy, Andriy and Neyts, Kristiaan},
  issn         = {0022-0248},
  journal      = {JOURNAL OF CRYSTAL GROWTH},
  language     = {eng},
  number       = {4},
  pages        = {690--698},
  title        = {Atomic layer deposition of ZnS thin films based on diethyl zinc and hydrogen sulfide.},
  volume       = {234},
  year         = {2002},
}

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