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Improvement of Temperature Uniformity in Rapid Thermal CVD Systems using Multivariable Control

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Chicago
VAN BILSEN, F, and Robain De Keyser. 2000. “Improvement of Temperature Uniformity in Rapid Thermal CVD Systems Using Multivariable Control.” In The Eletrochemical Society 197th Meeting.
APA
VAN BILSEN, F., & De Keyser, R. (2000). Improvement of Temperature Uniformity in Rapid Thermal CVD Systems using Multivariable Control. The Eletrochemical Society 197th Meeting. Presented at the The Eletrochemical Society 197th Meeting.
Vancouver
1.
VAN BILSEN F, De Keyser R. Improvement of Temperature Uniformity in Rapid Thermal CVD Systems using Multivariable Control. The Eletrochemical Society 197th Meeting. 2000.
MLA
VAN BILSEN, F, and Robain De Keyser. “Improvement of Temperature Uniformity in Rapid Thermal CVD Systems Using Multivariable Control.” The Eletrochemical Society 197th Meeting. 2000. Print.
@inproceedings{130148,
  author       = {VAN BILSEN, F and De Keyser, Robain},
  booktitle    = {The Eletrochemical Society 197th Meeting},
  language     = {eng},
  location     = {Ontario, Canada},
  pages        = {8},
  title        = {Improvement of Temperature Uniformity in Rapid Thermal CVD Systems using Multivariable Control},
  year         = {2000},
}