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Improvement of Temperature Uniformity in Rapid Thermal CVD Systems using Multivariable Control

F VAN BILSEN and Robain De Keyser UGent (2000) The Eletrochemical Society 197th Meeting.
Please use this url to cite or link to this publication:
author
organization
year
type
conference
publication status
published
subject
in
The Eletrochemical Society 197th Meeting
pages
8 pages
conference name
The Eletrochemical Society 197th Meeting
conference location
Ontario, Canada
conference start
2000-05-14
conference end
2000-05-18
language
English
UGent publication?
yes
classification
C1
id
130148
handle
http://hdl.handle.net/1854/LU-130148
date created
2004-01-14 13:36:00
date last changed
2016-12-19 15:35:22
@inproceedings{130148,
  author       = {VAN BILSEN, F and De Keyser, Robain},
  booktitle    = {The Eletrochemical Society 197th Meeting},
  language     = {eng},
  location     = {Ontario, Canada},
  pages        = {8},
  title        = {Improvement of Temperature Uniformity in Rapid Thermal CVD Systems using Multivariable Control},
  year         = {2000},
}

Chicago
VAN BILSEN, F, and Robain De Keyser. 2000. “Improvement of Temperature Uniformity in Rapid Thermal CVD Systems Using Multivariable Control.” In The Eletrochemical Society 197th Meeting.
APA
VAN BILSEN, F., & De Keyser, R. (2000). Improvement of Temperature Uniformity in Rapid Thermal CVD Systems using Multivariable Control. The Eletrochemical Society 197th Meeting. Presented at the The Eletrochemical Society 197th Meeting.
Vancouver
1.
VAN BILSEN F, De Keyser R. Improvement of Temperature Uniformity in Rapid Thermal CVD Systems using Multivariable Control. The Eletrochemical Society 197th Meeting. 2000.
MLA
VAN BILSEN, F, and Robain De Keyser. “Improvement of Temperature Uniformity in Rapid Thermal CVD Systems Using Multivariable Control.” The Eletrochemical Society 197th Meeting. 2000. Print.